Vision Unit Alignment for Substrate Processing Apparatus
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in accurately aligning and setting the positions and movement axes of vision units to ensure precise dispensing of processing liquids onto high-resolution display elements, such as liquid crystal and organic EL display elements, due to the complexity of managing the dispensing points and nozzle alignment.
Innovation Solution
A method for setting the substrate processing apparatus involves aligning the positions and movement axes of vision units by using reference marks and alignment marks on substrates, with vision units identifying ink droplets and nozzles, and adjusting the movement axes to ensure accurate alignment and image acquisition, allowing for precise control of ink dispensing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple vision units and cameras are added to accurately manage dispensing positions and nozzle alignment, then measurement precision and manufacturing precision are improved, but device complexity increases
Solution Approach 1:
The patent applies preliminary action by pre-setting reference marks on the substrate and alignment marks on the apparatus before the actual dispensing process. These marks are prepared in advance to enable accurate positioning and alignment of vision units, eliminating the need for complex real-time measurement systems during operation.
Solution Approach 2:
The patent introduces reference marks and alignment marks as intermediary elements that facilitate the alignment process. These marks serve as mediators between the vision units and the physical components (nozzles, substrate), enabling accurate positioning without requiring direct complex measurements between all components.
2Manufacturing precision
If reference marks and alignment marks are used to align vision units, then positioning accuracy is improved, but the manufacturing process complexity increases
Solution Approach 1:
The reference marks on substrates and alignment marks on the apparatus are prepared in advance during manufacturing or setup. This preliminary marking process enables subsequent vision units to be aligned accurately without requiring complex real-time adjustments, simplifying the actual manufacturing operation.
Solution Approach 2:
The patent uses alignment marks that can be copied or replicated across multiple substrates and apparatus components. This copying approach ensures consistent alignment across different production runs and components, maintaining manufacturing precision while simplifying the setup process through standardization.
Data Source
AI summary
A method for setting a substrate processing apparatus having a head for dispensing ink includes aligning a position of at least one vision unit, by moving the vision unit above a reference mark and taking, by the vision unit, an image of the reference mark, in which the vision unit takes an image of a substrate, and the reference mark is made on the substrate processing apparatus and fixed in one position, and aligning at least one of a movement axis of the vision unit, a position of the substrate, or a movement axis of the substrate, by moving the vision unit or the substrate in a state in which the substrate having alignment marks made thereon is located under the vision unit and taking, by the vision unit, an image of the alignment marks.