Visual Command Script Editing for Semiconductor Process Automation
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Solution Overview
Problem
The complexity of semiconductor manufacturing processes requires labor-intensive operation of semiconductor manufacturing apparatus, leading to potential mistakes, and existing command script editing methods are cumbersome, necessitating a more efficient method for creating and editing command scripts for robotic process automation (RPA) devices.
Innovation Solution
A command script editing method and editor with a graphic user interface that allows users to switch between image editing mode and process editing mode, enabling editing of command scripts through intuitive actions such as inputting, image identification, and process actions without extensive typing or complex instructions, using a switching unit, display unit, and editing units to manage operation frames and flowcharts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If traditional typing or complex instructions inputting is used to edit command scripts, then the command scripts can be created for semiconductor manufacturing apparatus, but the editing process becomes cumbersome and time-consuming
Solution Approach 1:
The patent replaces traditional text typing and complex instruction inputting with visual drag-and-drop operations. Users can create command scripts by visually selecting and dragging operation frames from a palette onto a canvas, rather than manually typing commands. This substitution of mechanical text input with visual manipulation significantly reduces editing complexity and improves productivity.
Solution Approach 2:
The patent introduces a visual canvas and operation frame palette as intermediary elements between the user and the command script. These intermediaries provide a graphical interface where users can visually construct scripts by arranging operation frames, serving as a mediator that simplifies the complex process of script creation without requiring direct text manipulation.
2Reliability
If manual operation of semiconductor manufacturing apparatus is performed, then the apparatus can be operated, but the process becomes labor intensive and prone to mistakes
Solution Approach 1:
The patent enables preliminary action by allowing users to pre-configure command scripts that define the exact sequence of operations for semiconductor manufacturing apparatus. These scripts are created in advance with precise parameters and can be automatically executed, eliminating the need for manual operations during production and ensuring consistent, error-free execution.
Solution Approach 2:
The patent implements self-service automation where the pre-configured command scripts automatically control the semiconductor manufacturing apparatus without human intervention. The system executes the scripted operations autonomously, reducing labor intensity and minimizing human error while maintaining high operational reliability.
3Adaptability or versatility
If multiple command scripts need to be edited for diverse semiconductor products, then the automation coverage can be expanded, but the editing workload increases significantly
Solution Approach 1:
The patent enables copying and reusing of operation frames and command script templates across different semiconductor products. Once a command script is created for one product, it can be copied and adapted for other products with similar manufacturing steps, significantly reducing the time required to create scripts for diverse products while maintaining broad automation coverage.
Solution Approach 2:
The patent creates a universal command script editing system where operation frames and script templates can serve multiple purposes across different semiconductor products and manufacturing apparatus. The visual editing approach and template reuse capability provide multi-functionality that allows a single script structure to be adapted for various products, expanding automation coverage without proportionally increasing editing workload.
Data Source
AI summary
A command script editing method, a command script editor and a graphic user interface are provided. The command script editing method includes the following steps. The command node is edited according to at least one inputting action or at least one image identifying action performed on the operation frame when the command script editor is at an image editing mode. The command node is edited according to a setting content of at least one process action when the command script editor is at a process editing mode.


