Voltage-Controlled Polarization Imaging for Center-Edge Inspection
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Solution Overview
Problem
Current imaging systems face challenges in efficiently inspecting both the center and edge areas of measurement targets, such as in semiconductor, display, and secondary battery fields, where precise shape measurement and internal thin film thickness measurement are critical for product quality and stability.
Innovation Solution
The proposed imaging system incorporates a first polarization structure and a meta-lens, with separate power supplies to adjust the polarization state of light. This system includes a second polarization structure and an image sensor to capture polarized light, allowing for the differentiation between center and edge area imaging based on voltage adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single imaging system is used to inspect both center and edge areas, then system complexity is reduced, but imaging quality and measurement precision deteriorate
Solution Approach 1:
The patent applies the dynamics principle by making the polarization state adjustable through voltage control. The first and second polarization structures can dynamically change their polarization characteristics based on applied voltages, allowing the single imaging system to adapt its imaging mode between center area and edge area inspection, thereby maintaining high imaging quality while using a unified system.
Solution Approach 2:
The patent implements parameter changes by modifying the polarization state parameters of light through voltage-controlled polarization structures. By changing the polarization parameters (orientation, ellipticity) of incident light and detected light, the system can switch between different imaging modes for center and edge areas, ensuring optimal measurement precision for each region without requiring separate systems.
2Measurement precision
If separate imaging systems are used for center and edge areas, then imaging quality is maintained, but device complexity and inspection time increase
Solution Approach 1:
The patent applies universality by designing a single imaging system that performs multiple functions: inspecting both center areas and edge areas of measurement targets. The system achieves this by incorporating voltage-controlled polarization structures that can be adjusted to optimize imaging for different target regions, eliminating the need for separate dedicated systems while maintaining imaging quality for both center and edge areas.
Solution Approach 2:
The system uses dynamic voltage control of polarization structures to switch between different imaging modes. This dynamic adjustment allows one system to replace multiple static systems, reducing overall device complexity while maintaining the imaging quality that would otherwise require separate specialized systems for center and edge area inspection.
3Productivity
If voltage is adjusted to differentiate center and edge area imaging, then inspection efficiency improves, but control complexity increases
Solution Approach 1:
The patent uses parameter changes in the voltage applied to polarization structures to differentiate between center and edge area imaging modes. By adjusting voltage parameters, the system can switch imaging modes to optimize inspection efficiency for different target regions. The control complexity is managed through systematic voltage adjustment protocols that correlate specific voltage ranges with specific imaging modes.
Solution Approach 2:
The system incorporates feedback mechanisms where the imaging results inform subsequent voltage adjustments to the polarization structures. This feedback loop enables automatic optimization of imaging parameters for different target areas, improving inspection efficiency while managing control complexity through adaptive rather than purely manual control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables improved efficiency and performance in imaging systems by allowing a single system to effectively inspect both center and edge areas of measurement targets, enhancing product quality control and stability.
Implementation Method 1
a first polarization structure that polarizes light provided from a light source into first polarized light responsive to a first voltage
Implementation Method 2
a meta-lens on which the first polarized light is incident
Implementation Method 3
a second polarization structure that converts the first polarized light that passes through the meta-lens into second polarized light responsive to a second voltage
Implementation Method 4
an image sensor that senses the second polarized light
Data Source
AI summary
An imaging system that includes a first polarization structure that polarizes light provided from a light source into first polarized light, a first power supply connected to the first polarization structure and that applies a first voltage to the first polarization structure, a meta-lens on which the first polarized light is incident, a second polarization structure that converts the first polarized light that passes through the meta-lens into second polarized light, a second power supply connected to the second polarization structure and that applies a second voltage to the second polarization structure, and an image sensor that senses the second polarized light. The first voltage and the second voltage are different from each other.