Voltage Step-Change and Polarity Conversion for Ripple-Free Dual DC Output
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Solution Overview
Problem
Existing power conversion systems for semiconductor wafer plating fail to achieve high-quality dual voltage without ripple components and sufficient dynamic response, leading to uneven plating due to inadequate voltage step change and polarity conversion.
Innovation Solution
A power conversion system incorporating a three-phase AC-to-DC conversion circuit, multiple DC-to-DC conversion circuits, a voltage step change circuit, and voltage polarity conversion circuits to generate and adjust DC voltages with precise step changes and polarity conversions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional power conversion systems are used for dual voltage supply, then the system structure is simple, but the output ripple component cannot be completely eliminated causing uneven plating
Solution Approach 1:
The power conversion system is divided into multiple independent DC-to-DC conversion circuits (first, second, and third circuits) that separately generate different voltage outputs. Each circuit processes the DC power supply independently to produce specific voltages (DC voltage, first voltage, second voltage) with minimized ripple, allowing precise control over output quality for plating applications.
Solution Approach 2:
Multiple DC-to-DC conversion circuits are combined with voltage step change and polarity conversion circuits to create an integrated system. The circuits work together where the first DC-to-DC conversion circuit generates DC voltage, the second generates first voltage, the third generates second voltage, and these are combined through step change and polarity conversion to produce the final dual voltage output with minimal ripple.
2Speed
If conventional power conversion systems are used, then the device complexity is low, but the output dynamic response is insufficiently rapid failing to achieve desired voltage step change
Solution Approach 1:
The system pre-generates multiple voltage levels (DC voltage, first voltage, second voltage) through separate DC-to-DC conversion circuits before polarity conversion is needed. This preliminary preparation of voltage levels enables rapid switching and step changes during polarity conversion without requiring complex real-time adjustment, improving dynamic response speed.
Solution Approach 2:
The voltage polarity conversion circuit dynamically switches between different voltage inputs based on required output polarity. The circuit can rapidly transition between positive and negative voltage outputs by switching between the pre-generated voltage levels from different DC-to-DC conversion circuits, achieving fast dynamic response for voltage step changes.
3Manufacturing precision
If multiple DC-to-DC conversion circuits are used to eliminate ripple, then the output voltage quality improves, but the system complexity increases
Solution Approach 1:
Each DC-to-DC conversion circuit is designed to perform multiple functions: voltage transformation, ripple filtering, and providing input for polarity conversion. The circuits use universal components (inductors, capacitors, switches) that serve both power conversion and filtering purposes, reducing overall system complexity despite multiple circuits being used.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively generates output voltages with controlled step changes and polarity conversions, minimizing ripple components and ensuring efficient, high-quality dual voltage supply for semiconductor wafer plating.
Implementation Method 1
a three-phase AC-to-DC conversion circuit, receives a three-phase power supply, and converts the three-phase power supply into a DC power supply
Implementation Method 2
a plurality of DC-to-DC conversion circuits receive the DC power supply, and respectively convert the DC power supply to generate a DC voltage, a first voltage, and a second voltage
Data Source
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AI summary
A power conversion system with voltage step change and voltage polarity conversion includes a three-phase AC-to-DC conversion circuit (100), a plurality of DC-to-DC conversion circuits (200), a voltage step change circuit (300), and a voltage polarity conversion circuit (400). The voltage step change circuit (300) receives a DC voltage (V1), a first voltage (Vp1), and a second voltage (Vn1), and adds the first voltage (Vp1) to the DC voltage (V1) or subtracts the second voltage (Vn1) from the DC voltage (V1) so as to provide a step-changed DC voltage (Vx). The voltage polarity conversion circuit (400) receives the step-changed DC voltage (Vx) and converts a polarity of the step-changed DC voltage (Vx) to provide a DC output voltage (Vo1).