Voltage Step-Change and Polarity Conversion for Ripple-Free Wafer Plating
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Solution Overview
Problem
Existing power conversion systems for semiconductor wafer plating face challenges in achieving high-quality dual voltage without ripple components and insufficient dynamic response for voltage step changes, leading to uneven plating on wafer surfaces.
Innovation Solution
A power conversion system incorporating a three-phase AC-to-DC conversion circuit, multiple DC-to-DC conversion circuits, a voltage step change circuit, and voltage polarity conversion circuits to generate and adjust DC voltages with precise step changes and polarity conversions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional power conversion systems are used for semiconductor wafer plating, then the system structure is simple, but the output voltage contains ripple components and the dynamic response is slow, leading to uneven plating quality
Solution Approach 1:
The power conversion system is divided into multiple independent DC-to-DC conversion circuits (first, second, and third circuits) that operate in parallel. Each circuit processes voltage independently, allowing the system to achieve high-quality ripple-free output through coordinated operation while maintaining modular simplicity in individual circuit design
Solution Approach 2:
Multiple DC-to-DC conversion circuits are combined with a voltage addition circuit that merges their outputs. The first and second conversion circuits generate voltages that are added together, while the third circuit provides additional voltage contribution, collectively producing the high-quality dual voltage output required for precise plating control
2Speed
If conventional voltage conversion circuits are used, then the device complexity is low, but the output voltage cannot achieve rapid step changes, resulting in insufficient dynamic response
Solution Approach 1:
The control circuit dynamically adjusts the duty cycles of multiple DC-to-DC conversion circuits in real-time based on voltage detection feedback. This dynamic control enables rapid step changes in output voltage by independently modulating each conversion circuit's switching duty cycle, achieving fast transient response without requiring complex hardware modifications
Solution Approach 2:
A voltage detection circuit continuously monitors the output voltage and feeds this information back to the control circuit. The control circuit uses this feedback to automatically adjust the duty cycles of the DC-to-DC conversion circuits, enabling rapid correction of voltage deviations and achieving fast dynamic response for voltage step changes
3Adaptability or versatility
If conventional single-voltage power supplies are used, then the system is simple, but dual voltage with different polarities cannot be provided, limiting plating process flexibility
Solution Approach 1:
The multiple DC-to-DC conversion circuits are designed to operate in a coordinated manner where the first and second circuits generate voltages of one polarity that are added together, while the third circuit generates voltage of opposite polarity. This multi-functional arrangement allows a single power conversion system to provide dual voltage outputs with different polarities, enabling flexible plating processes without requiring separate power supplies
Data Source
AI summary
A power conversion system with voltage step change and voltage polarity conversion includes a three-phase AC-to-DC conversion circuit, a plurality of DC-to-DC conversion circuits, a voltage step change circuit, and a voltage polarity conversion circuit. The voltage step change circuit receives a DC voltage, a first voltage, and a second voltage, and adds the first voltage to the DC voltage or subtracts the second voltage from the DC voltage so as to provide a step-changed DC voltage. The voltage polarity conversion circuit receives the step-changed DC voltage and converts a polarity of the step-changed DC voltage to provide a DC output voltage.