Source-Side VRM Structure for Floating-Body N-Type MOSFETs

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Solution Overview

Problem

The floating body effect (FBE) in N-type MOSFETs, particularly those using silicon-on-insulator (SOI) technology, leads to adverse effects such as parasitic transistor activation and increased hot carrier injection, affecting reliability and switching characteristics.

Innovation Solution

Incorporating a source-side structure with a Vbi Reduction Material (VRM) layer having a lower bandgap than silicon, allowing freer movement of holes from the body to the source region, thereby reducing the built-in voltage (Vbi) and mitigating the FBE.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a conventional N-type MOSFET structure is used, then the device can handle high drain voltages, but the floating body effect causes parasitic transistor activation and increased hot carrier injection

Engineering Contradiction:
Improvedrain voltage handling capabilityVSAvoiddevice reliability
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent applies local quality by introducing a specialized source region with distinct material composition (silicon-germanium alloy) only at the source side of the device. This localized modification creates a lower built-in potential at the source-body junction, enhancing hole collection efficiency specifically where needed to mitigate the floating body effect, while preserving the overall high-voltage capability of the device structure.

Inventive Principle:
Principle #3Local quality

2Reliability

If the built-in voltage is reduced by adding a Vbi Reduction Material layer, then body hole collection efficiency increases and floating body effect is reduced, but the device structure becomes more complex

Engineering Contradiction:
Improvefloating body effect reductionVSAvoidsource region structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent employs composite materials by integrating a silicon-germanium alloy layer within the source region structure. This composite approach combines the properties of silicon and germanium to achieve a lower bandgap material that reduces the built-in potential at the source-body junction, thereby enhancing hole collection efficiency and mitigating the floating body effect through material composition rather than structural complexity.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Significantly reduces the floating body effect by enhancing body hole collection efficiency, minimizing off-state leakages and maintaining reliable switching characteristics under high drain voltages.

Implementation Method 1

VRM has a bandgap less than the bandgap of Si and, for an N-type device, a valence band that is higher than the valence band of the body material

Methodology Applied
Scientific EffectBandgap:

Implementation Method 2

The low Vbi of the VRM layer on the source-side of an N-type MOSFET device that would otherwise exhibit an FBE allows significantly freer movement of holes from the body of the device towards the source region

Methodology Applied
Scientific EffectCarrier movement: Conduction (electrical)

Data Source

PatentUS20250324749A1Reduction of the Floating Body Effect in N-Type MOSFET Devices
Publication Date: 2025.10.16 MURATA MFG CO LTD
  • US20250324749A1 patent drawing
  • US20250324749A1 patent drawing
  • US20250324749A1 patent drawing

AI summary

Novel NEDMOS and/or LDMOS FET integrated circuit structures that reduce or eliminate the floating body effect by reducing the built-in voltage Vbi of the device. Reduction of Vbi includes adding a source-side structure that includes a “Vbi Reduction Material” (VRM) layer. VRM has a bandgap less than the bandgap of Si and, for an N-type device, a valence band that is higher than the valence band of the body material. The low Vbi of the VRM layer on the source-side of a MOSFET device that would otherwise exhibit a floating body effect allows significantly freer movement of holes from the body of the device towards the source region, thus increasing body hole collection efficiency, and significantly reduces the floating body effect.