VUV Beam Characterization with Movable Transmission Grating

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Solution Overview

Problem

Current methods for characterizing vacuum ultraviolet (VUV) light sources require significant changes to the light source assembly to switch between spectrometer and beam profiling modes, lacking a device that can seamlessly switch between these modes without disturbing the photon beam or breaking the vacuum.

Innovation Solution

A device comprising a transmission grating for diffracting photon beams and an image detector for measuring the diffracted output, integrated with a stage that allows for in-vacuum operation, enabling simultaneous spectrometer and beam profiler functions without altering the beam path or vacuum.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If traditional separate devices are used for spectrometer and beam profiler modes, then measurement functionality is preserved, but device complexity and space requirements increase

Engineering Contradiction:

Improvemode switching capabilityVSAvoidsetup complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines the spectrometer and beam profiler functionalities into a single integrated device. The transmission grating serves dual purposes: for spectrometer mode, it diffracts photons onto the detector to measure spectral distribution; for beam profiler mode, the same grating disperses the beam spatially to measure intensity distribution. This merging eliminates the need for separate devices and complex switching mechanisms, directly resolving the technical contradiction between versatility and device complexity.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The transmission grating is designed as a universal optical element that performs multiple functions depending on the measurement mode. By adjusting the detector position or grating orientation, the same physical component enables both spectral analysis and spatial profiling without requiring mode-specific hardware, thereby reducing overall system complexity while maintaining adaptability.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Ease of operation

If major changes are made to the light source assembly to switch modes, then functionality is preserved, but loss of time and operational convenience deteriorate

Engineering Contradiction:

Improvemode switching convenienceVSAvoidmode switching time

Core Design Contradiction:

Ease of operationVSLoss of time

Solution Approach 1:

The device incorporates dynamic adjustability where the detector position or grating angle can be changed to switch between measurement modes. This dynamic configuration allows rapid mode switching without requiring major structural changes or disassembly of the light source assembly, directly addressing the contradiction between operational ease and time loss.

Inventive Principle:

Principle #15Dynamics

3Area of stationary object

If tight space restrictions are imposed on the setup, then space efficiency is improved, but measurement precision and functionality worsen

Engineering Contradiction:

Improvesetup areaVSAvoidbeam characterization precision

Core Design Contradiction:

Area of stationary objectVSMeasurement precision

Solution Approach 1:

The patent employs a compact nested arrangement where the transmission grating and detector are positioned in close proximity, with the grating effectively nested within the detection path. This nested configuration minimizes the overall footprint of the device while maintaining sufficient optical path length for precise measurements, thereby resolving the contradiction between space efficiency and measurement precision.

Inventive Principle:

Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables in-situ characterization of VUV beams with minimal installation effort and no alignment deterioration, allowing for quick mode switching and precise measurement of spectral and spatial profiles within the VUV photon energy regime.

Implementation Method 1

a transmission grating capable of diffracting a photon beam into a diffracted photon output

Methodology Applied

Scientific EffectDiffraction: Diffraction

Implementation Method 2

an image detector capable of detecting the diffracted photon output

Methodology Applied

Scientific EffectPhotoelectric detection: Photoelectric Effect

Data Source

PatentUS8569677B2Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector

Publication Date: 2013.10.29 RGT UNIV OF CALIFORNIA

AI summary

The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.