VUV Polarizer Grid Oxide Materials for Photo-Alignment
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Solution Overview
Problem
Current grid polarizers are ineffective for polarizing vacuum ultraviolet (VUV) light below 200 nm, as they can damage molecular structures due to high energy, and there is a lack of suitable materials and configurations for VUV polarizers in photo-alignment processes.
Innovation Solution
A VUV polarizer with a transparent substrate and a grid made of oxide materials from Group 3 or Group 4 elements, such as hafnium oxide, with no filler between linear parts, optimized for high anti-oxidation properties and designed to achieve high transmittance and extinction ratio in the VUV range, along with an inert gas atmosphere to prevent oxidation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If VUV light (wavelength ≤200 nm) is used for photo-alignment to enhance process efficiency, then the process efficiency is improved, but the molecular structure of the object may be destroyed due to excessively high energy
Solution Approach 1:
The patent introduces a VUV polarizer as an intermediary device between the VUV light source and the object to be aligned. This polarizer selectively transmits polarized VUV light while blocking non-polarized components, enabling controlled irradiation that maintains high process efficiency while reducing molecular structure damage through optimized polarization properties
2Ease of operation
If a grid polarizer is used to polarize VUV light, then polarization function is achieved, but the grid material deteriorates due to oxidation from VUV irradiation
Solution Approach 1:
The patent employs an inert gas atmosphere (such as nitrogen or rare gases) to surround the grid polarizer during VUV irradiation. This inert environment prevents oxidation of the grid material by excluding oxygen, thereby maintaining the structural integrity and polarization performance of the grid over extended operational periods
Solution Approach 2:
The patent utilizes composite material structures for the grid polarizer, combining materials with complementary properties - such as metal grids coated with oxidation-resistant layers or composite substrate structures - to achieve both effective VUV polarization and enhanced resistance to VUV-induced oxidation
3Ease of manufacture
If conventional grid polarizers are used for VUV light, then they can be manufactured with existing technology, but they cannot achieve high transmittance and extinction ratio in the VUV range
Solution Approach 1:
The patent optimizes key parameters of the grid polarizer including grid line width, spacing, thickness, and material composition specifically for VUV wavelengths. By adjusting these parameters within controlled ranges, the polarizer achieves high transmittance for polarized light and high extinction ratio while remaining compatible with existing manufacturing capabilities
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides high polarization performance and long-term stability for VUV light, enhancing the efficiency and reliability of photo-alignment processes by preventing grid deterioration and maintaining high polarization performance.
Implementation Method 1
absorption type grid polarizers utilizing light absorption in a shorter wavelength range
Implementation Method 2
A material of each linear part is an oxide of an element of Group 3 or Group 4, and makes PE not less than 0.2 under an optical constant combination making PE maximum in the VUV range
Implementation Method 3
along with an inert gas atmosphere to prevent oxidation
Data Source
AI summary
The present invention is to provide an appropriate configuration of a VUV polarizer that can be used for such a process as photo-alignment. The VUV polarizer can polarize VUV light not more than 200 nm in wavelength, and has a substrate transparent to the VUV light and a grid on the substrate. The grid is formed of a lot of linear parts in parallel and structured with no filler between the linear parts. A material of each linear part is an oxide of a Group 3 element or Group 4 element, and makes PE not less than 0.2 under an optical constant combination making PE maximum in the VUV range, where PE=T2×log10(ER), T is the transmittance of the grid, and ER is the extinction ratio of the grid. A workpiece is subjected to a photo-alignment processing by irradiation of VUV polarized light emitting from the VUV polarizer.