Wafer Alignment Mechanism for High-Precision Bonding
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional methods for positioning a bonding target, such as a wafer, on a chuck unit in bonders lack the necessary accuracy, especially when relying on transport devices, and the use of optical devices for precision increases complexity and cost.
Innovation Solution
An alignment mechanism with a rotary unit and power transmission mechanisms that synchronize the movement of alignment action units to adjust the target's position from multiple directions, allowing precise positioning without the need for complex optical systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a transport device is used for positioning the bonding target on the suction surface, then the positioning function is provided, but the positioning accuracy is limited and cannot achieve high precision
Solution Approach 1:
The positioning function is segmented between the transport device (粗定位) and the alignment mechanism (精定位). The alignment mechanism is further segmented into three independent alignment action units, each capable of independent adjustment. This segmentation allows the system to achieve high positioning accuracy without requiring the entire transport device to be highly precise.
Solution Approach 2:
The alignment mechanism enables the bonding target to self-align on the suction surface through the action of three alignment action units that apply forces from different directions. The target automatically positions itself without requiring complex external guidance systems, achieving high accuracy through self-service alignment.
2Measurement precision
If an optical device such as a camera or microscope is used for positioning, then high positioning accuracy can be achieved, but the bonder becomes more complicated and costly
Solution Approach 1:
The patent replaces optical positioning systems with a purely mechanical alignment mechanism. Three alignment action units with adjustable arms and contact points provide mechanical feedback and force application to position the target. This mechanical substitution eliminates the need for cameras, microscopes, and associated optical infrastructure, reducing complexity while maintaining high positioning accuracy.
Solution Approach 2:
The mechanical alignment mechanism allows the bonding target to self-align through physical contact with the three alignment action units. The target's own geometry and the mechanical constraints of the alignment units work together to achieve precise positioning without external optical observation or intervention.
3Manufacturing precision
If three alignment action units are used to catch the alignment target from three directions, then high positioning accuracy is achieved, but the mechanism becomes more complex
Solution Approach 1:
Each of the three alignment action units has locally optimized structure and function, with adjustable arms and contact points tailored for specific alignment tasks. This local quality allows each unit to be simple yet effective, and their combination achieves high overall precision without requiring each individual component to be overly complex.
Solution Approach 2:
The three alignment action units are merged into a single integrated alignment mechanism that shares common components such as the rotary unit, power transmission mechanisms, and control system. This merging reduces overall complexity compared to having three separate positioning systems, while still providing the benefits of multi-directional alignment capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution achieves high accuracy in positioning bonding targets with a simple configuration, reducing complexity and cost while ensuring precise alignment.
Implementation Method 1
three power transmission mechanisms pivotably supported at three different positions at the rotary unit shifted from the first rotary axis
Implementation Method 2
Each of the three power transmission mechanisms comprises a first arm and a second arm. The first arm includes a first end pivotably supported at a corresponding one of the three different positions, and a second end located on the opposite side of the first end
Implementation Method 3
The three alignment action units are connected to the respective second arms of corresponding ones of the three power transmission mechanisms, and the respective second rotary axes of the three second arms are arranged at three positions separated from the rotary unit toward three different directions centered on the first rotary axis
Data Source
AI summary
An alignment mechanism comprises a rotary unit 61 with a first rotary axis 61c, three power transmission mechanisms 62, and three alignment action units 63. Each power transmission mechanism 62 comprises a first arm 621 and a second arm 622. The first arm 621 includes a first end 621a pivotably supported at a corresponding one of three different positions P11 to P13, and a second end 621b on the opposite side of the first end 621a. The second arm 622 includes a second rotary axis 622c and is pivotably supported on the second end 621b of the first arm 621 at a position different from the second rotary axis 622c. The alignment action units 63 are connected to corresponding second arms. The second rotary axes 622c are at three positions P21 to P23 separated from the rotary unit 61 toward three different directions centered on the first rotary axis 61c.