Wafer Boat Storage Alignment Using Rolling Contact to Cut Contamination
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Solution Overview
Problem
The existing wafer boat temporary storage apparatus causes contamination of wafers due to graphite particles being rubbed off during the sliding contact between the positioning structure and the wafer boat, leading to poor wafer cleanliness.
Innovation Solution
A wafer boat temporary storage device with two carrying platforms that utilize first and second positioning structures making rolling contact with the wafer boat's positioning parts to align and anchor the wafer boat, reducing friction and contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If sliding contact positioning structure is used, then alignment function is achieved, but graphite particles are rubbed off contaminating the wafer
Solution Approach 1:
The patent replaces the sliding contact mechanical positioning system with a magnetic field-based positioning system. The wafer boat is equipped with a magnetic positioning part that interacts with a magnetic field generated by the positioning device, eliminating direct mechanical contact between the positioning structure and the wafer boat. This substitution of mechanical contact with magnetic field interaction achieves precise alignment without rubbing off graphite particles from the wafer boat surface.
2Temperature
If cooling air is blown to the wafer boat, then cooling effect is achieved, but graphite particles are blown toward the wafer causing contamination
Solution Approach 1:
By replacing the mechanical sliding contact positioning system with a magnetic field-based positioning system, the patent eliminates the generation of graphite particles at the source. Since no mechanical rubbing occurs between the positioning structure and the wafer boat, there are no graphite particles to be blown toward the wafer by the cooling air, thus resolving the contamination issue while maintaining effective cooling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The rolling contact between the positioning structures and the wafer boat's positioning parts minimizes graphite particle contamination, thereby improving wafer cleanliness during the cooling process.
Implementation Method 1
The first positioning structure is configured to make rolling contact with two sides of the two positioning parts at one end of the wafer boat that face toward or away from the two positioning parts at the other end of the wafer boat in the length direction
Implementation Method 2
The second positioning structure is configured to make rolling contact with two sides of the two positioning parts at one end of the wafer boat that face toward or away from each other in the length direction
Implementation Method 3
a cooling component of the wafer boat temporary storage apparatus blows cold air to the wafer boat to cool the wafer boat
Data Source
AI summary
A wafer boat temporary storage device for temporarily storing a wafer boat in a semiconductor processing device includes two carrying platforms arranged oppositely and configured to carry two ends of the wafer boat in a length direction of the wafer boat, respectively. The wafer boat includes two positioning parts arranged at two ends in the length direction and spaced apart in a width direction of the wafer boat. Each carrying platform includes a first positioning structure and a second positioning structure. The first positioning structure is configured to make rolling contact with two sides of the two positioning parts at one end of the wafer boat that face toward or away from the two positioning parts at the other end of the wafer boat in the length direction to perform alignment between the wafer boat and the wafer boat temporary storage device in the length direction.