Wafer Buffer Device Vertical Transport Horizontal Removal

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Solution Overview

Problem

Existing methods for buffering and cleaning semiconductor wafers after batch processing are inefficient, leading to waiting times, quality losses, and space constraints, as they require manual handling and separate cleaning devices, and cannot maintain the original order of wafers during processing.

Innovation Solution

A device with vertical transport elements and a stationary removal device allows for the stacking and unloading of wafers in a space-saving manner, maintaining their original order, using a method that involves inserting wafers vertically between bearing areas and removing them horizontally, enabling simultaneous loading and unloading while maintaining the 'first in first out' principle.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual handling and separate cleaning devices are used, then flexibility in processing is maintained, but waiting times increase and productivity decreases

Engineering Contradiction:

Improveflexibility in processingVSAvoidproductivity

Core Design Contradiction:

Ease of operationVSProductivity

Solution Approach 1:

The patent combines the buffer storage function and the cleaning function into a single integrated device. The transport elements that circulate workpieces also serve as the cleaning mechanism, eliminating the need for separate cleaning devices and reducing waiting times while maintaining operational flexibility.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The device enables continuous processing by eliminating idle waiting times. Workpieces are cleaned immediately after being placed on the transport elements, without requiring separate handling steps or waiting periods, thus maintaining continuous productive action throughout the system.

Inventive Principle:

Principle #20Continuity of useful action

2Volume of moving object

If vertical stacking is used, then space efficiency improves, but maintaining the original order of workpieces becomes difficult

Engineering Contradiction:

Improvespace efficiencyVSAvoidoriginal order of workpieces

Core Design Contradiction:

Volume of moving objectVSLoss of information

Solution Approach 1:

The transport elements enable dynamic access to workpieces in the vertical stack. By circulating the transport elements, the system can bring any workpiece to an accessible position for removal while maintaining the vertical stacking arrangement, thus preserving both space efficiency and the original sequence of workpieces.

Inventive Principle:

Principle #15Dynamics

3Productivity

If rapid processing is implemented, then productivity increases, but quality losses may occur due to improper handling

Engineering Contradiction:

Improverapid processingVSAvoidquality of workpieces

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The workpieces clean themselves during the transport process. The cleaning action is performed automatically as workpieces are carried by the transport elements, eliminating the need for manual handling that could cause damage while maintaining rapid processing speeds and high quality standards.

Inventive Principle:

Principle #25Self-service

4Productivity

If integrated buffer and cleaning device is used, then productivity improves, but device complexity increases

Engineering Contradiction:

ImproveproductivityVSAvoiddevice complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The transport elements perform multiple functions simultaneously: they transport workpieces vertically, store workpieces in a compact arrangement, and clean the workpieces during circulation. This multi-functionality reduces the need for separate dedicated components, thereby limiting the increase in device complexity while achieving high productivity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS9199791B2Device and method for buffer-storing a multiplicity of wafer-type workpieces

Publication Date: 2015.12.01 SILTRONIC AG

AI summary

A multiplicity of wafer-type workpieces are buffer stored in a device having,a frame,at least two transport elements which each circulate in a vertical direction around an upper and a lower deflection device connected to the frame and are provided, at uniform intervals, with a multiplicity of bearing areas for the horizontal mounting of workpieces, wherein at least one of the deflection devices of each transport element is driven and a free space is situated between the transport elements,a loading position between the upper deflection devices at which a workpiece can be placed onto corresponding bearing areas, anda stationary removal device below the loading position, comprising a horizontal transport device, the first end of which lies within the free space between the transport elements. The invention also relates to a method for buffer-storing a multiplicity of wafer-type workpieces using the abovementioned device.