Wafer Carrier Wireless Humidity Sensor for Nitrogen Leakage
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Solution Overview
Problem
The complexity of semiconductor fabrication processes leads to increased time spent transferring and storing wafers, which can result in contamination due to various sources, including nitrogen gas leakage and particle contamination, complicating the monitoring and management of wafer carriers.
Innovation Solution
Integration of wireless communication circuitry and sensors within wafer carriers to detect humidity and vibrations, comparing these readings against thresholds and transmitting warning signals to an external host to determine contamination and leakage, thereby enabling real-time monitoring and management of wafer carriers during transfer and storage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If wafers are transferred and stored in carriers during fabrication processes, then productivity is improved by enabling continuous manufacturing, but the risk of contamination increases due to nitrogen gas leakage and particle contamination during transfer and storage
Solution Approach 1:
The patent implements humidity sensors and wireless communication circuitry that continuously monitor the carrier environment and provide feedback to the control system. When humidity exceeds thresholds indicating nitrogen leakage, the system automatically responds by adjusting nitrogen flow or alerting operators, creating a closed-loop control system that prevents contamination while maintaining productivity
Solution Approach 2:
The patent replaces manual inspection and mechanical monitoring systems with wireless sensor networks and automated detection systems. Humidity sensors, vibration sensors, and wireless communication modules substitute for traditional mechanical gauges and manual checking, enabling real-time contamination detection without mechanical intervention
2Measurement precision
If manual monitoring of carrier conditions is used, then device complexity is minimized, but measurement precision deteriorates due to inability to detect humidity and vibration changes accurately
Solution Approach 1:
The carrier system performs self-monitoring through integrated sensors that automatically detect humidity, temperature, and vibration conditions. The wireless communication circuitry enables the carrier to self-report its status to the central system without requiring external inspection equipment or manual measurement, achieving high measurement precision while keeping the added complexity minimal and self-contained
Solution Approach 2:
The patent employs multi-functional sensor modules that simultaneously monitor multiple parameters (humidity, temperature, vibration) using integrated circuits. This universal monitoring approach achieves comprehensive measurement precision while reducing overall system complexity by consolidating multiple detection functions into single sensor units with wireless communication capabilities
3Reliability
If real-time monitoring of carrier conditions is implemented, then reliability is improved by detecting contamination early, but loss of time increases due to data transmission and processing requirements
Solution Approach 1:
The system establishes predetermined humidity thresholds and vibration criteria before monitoring begins. When sensors detect conditions exceeding these pre-set thresholds, the system immediately triggers alerts and takes corrective action without requiring real-time data analysis or processing delays, enabling rapid response while maintaining detection reliability
Solution Approach 2:
The patent implements selective monitoring where the system focuses on critical parameters (humidity and vibration) that most directly indicate contamination risks. Rather than continuously analyzing all possible parameters, the system monitors only the most relevant conditions with high precision, reducing data processing time while maintaining reliable contamination detection through targeted measurement of excessive conditions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for effective detection and prevention of contamination, ensuring the integrity of semiconductor wafers by identifying nitrogen gas leakage and particle contamination, thereby reducing the risk of wafer damage and improving the efficiency of fabrication processes.
Implementation Method 1
wireless communication circuitry disposed on an inner sidewall of the case and configured to detect humidity of a gas contained in the case
Implementation Method 2
the wireless communication circuitry configured to detect at least one of (1) a humidity of a gas in the case or (2) vibration of the case or the wafers
Data Source
AI summary
A wafer carrier including a case having an opening at one end, slots disposed in the case and receiving wafers, and a wireless communication circuitry disposed on an inner sidewall of the case and configured to detect humidity of a gas contained in the case may be provided. The wireless communication circuitry may be further configured to compare the detected humidity with a threshold humidity predetermined, and transmit a first warning signal to an external host via wireless communication when the detected humidity is greater than the threshold humidity.