Wafer Carrier Plate Segmented Positioning for Stability
Solution Overview
Problem
Conventional wafer storage devices experience issues with wafers shifting or falling during transport due to the large distance between positioning elements and the wafer, leading to potential damage and handling difficulties.
Innovation Solution
A wafer storage device with a wafer cassette and carrier plates featuring pairs of retaining members and a positioning unit with slots and positioning members that securely hold the wafer in place, preventing movement and falling by abutting against the wafer's outer rim.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the carrier plate is designed with a size larger than the wafer for ease of accessing, then the ease of operation is improved, but the stability of the wafer on the carrier plate deteriorates due to the large distance between positioning portions and the wafer
Solution Approach 1:
The positioning function is segmented into multiple independent positioning portions (first positioning portion and second positioning portion) that can be independently adjusted. This allows the carrier plate to maintain a large size for ease of access while having distributed positioning points that provide stable support for the wafer, resolving the contradiction between plate size and wafer stability.
Solution Approach 2:
The positioning portions are designed to be movable relative to the carrier plate body, allowing dynamic adjustment of their positions. This enables the system to adapt the positioning configuration based on wafer size and placement requirements, maintaining both ease of operation and wafer stability across different operating conditions.
2Ease of operation
If the distance between positioning portions and the wafer is increased for ease of accessing, then the ease of operation is improved, but the reliability of wafer positioning deteriorates as the wafer may move or fall during transport
Solution Approach 1:
The positioning system is divided into multiple positioning portions distributed across the carrier plate. This segmentation allows each positioning portion to be optimally positioned relative to the wafer, providing reliable support while maintaining adequate spacing for ease of access. The distributed positioning portions work together to prevent wafer movement during transport.
Solution Approach 2:
The positioning portions are pre-configured in specific positions on the carrier plate before wafer placement, creating a predetermined stable configuration. This preliminary positioning arrangement ensures that when the wafer is placed, it is immediately secured by multiple positioning points, preventing movement during subsequent handling and transport while maintaining accessibility.
Data Source
AI summary
A wafer storage device includes a wafer cassette and a carrier plate. The wafer cassette includes a housing and a plurality pairs of retaining members disposed on lateral walls of the housing. The carrier plate is placed into the housing, is supported by one pair of the retaining members, and includes a plate body carrying the wafer thereon, and having a periphery formed with two slots extending respectively in two different radial directions of the wafer. Two positioning members respectively and radially correspond in position to the slots, and abut against an outer rim of the wafer.