Wafer Holding Clamp Inspection for Biasing Force Failures
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Solution Overview
Problem
Existing holding units for processing and cleaning of target objects, such as wafers, face challenges in ensuring proper holding due to potential deterioration or breakdown of biasing members, leading to incomplete fixation and increased risk of processing or cleaning failures.
Innovation Solution
A holding unit equipped with a fixing mechanism, a movement mechanism, and a controller that determines the state of the biasing member based on the pressing force of the actuator, allowing for immediate detection of abnormalities and preventing incomplete fixation of the target object.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If clamp mechanisms with biasing members are used to hold the target object, then the target object can be securely fixed to the holding surface, but the biasing member may deteriorate or break down over time leading to incomplete fixation
Solution Approach 1:
The system performs preliminary inspection of the biasing member's biasing force before actual processing. The inspection mechanism detects whether the biasing force is within the appropriate range, and only when the inspection passes does the system proceed to hold and process the target object, preventing failures due to deteriorated biasing members
Solution Approach 2:
The inspection mechanism provides feedback about the biasing member's condition. The controller receives inspection results and determines whether to allow processing to proceed, creating a closed-loop control system that monitors biasing member performance and takes appropriate action based on the monitored conditions
2Reliability
If inspection of the biasing member is performed continuously, then abnormalities can be detected early, but the device complexity and inspection time increase
Solution Approach 1:
The system performs inspection periodically between processing operations rather than continuously during processing. The inspection is conducted at intervals, checking the biasing member's condition before each new target object is held, which reduces complexity while maintaining reliability
Solution Approach 2:
The inspection mechanism uses the existing clamp mechanism structure and biasing member itself to perform the inspection. The pressing member utilizes the biasing force that already exists in the system, and the inspection leverages the mechanical components already present, avoiding the need for separate complex inspection equipment
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The holding unit effectively ensures that the target object is properly held during processing or cleaning by immediately identifying and addressing any issues with the biasing member, thereby preventing processing or cleaning failures.
Implementation Method 1
the fastening member is biased by a biasing member such as a coil spring
Implementation Method 2
a pressing member that presses the fastening member and an actuator that moves the pressing member
Data Source
AI summary
There is provided a holding unit that holds a target object by a holding surface of a holding table. The holding unit includes a fixing mechanism that fixes the target object to the holding surface, a movement mechanism that moves the fixing mechanism, and a controller. The fixing mechanism includes a fastening member allowed to be disposed at a fixing position at which the fastening member fastens the target object and fixes the target object to the holding surface and a release position at which the fastening member releases the target object and a biasing member that biases the fastening member toward the side of the fixing position. The movement mechanism includes a pressing member that presses the fastening member and an actuator that moves the pressing member to position the fastening member to the release position.