Wafer Container Air-Tight Device with Early-Stage Pressure Adjustment
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Solution Overview
Problem
Traditional FOUP containers have limited air-exhausting elements, leading to prolonged purging times and difficulty in opening under air-tight conditions, which hampers the maintenance of cleanliness and efficiency in semiconductor production.
Innovation Solution
Incorporation of an air-tight device with early-stage pressure-adjusting elements, such as protruding parts with concave or through-hole configurations, between the door and door frame, which allows for pre-adjusting pressure by pumping a second gas into the container, expediting the purging process and maintaining air-tight conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If traditional FOUP containers use limited air-exhausting elements, then the container structure remains simple, but the purging time is prolonged and door opening becomes difficult under air-tight conditions
Solution Approach 1:
The early-stage pressure-adjusting elements are built into the air-tight device structure beforehand, allowing pressure equalization to occur automatically at the beginning of the purging process. This preliminary pressure adjustment mechanism is pre-configured in the door frame and door structure, enabling faster purging without requiring complex external pressure control systems.
Solution Approach 2:
The air-tight device with integrated pressure-adjusting elements acts as an intermediary mechanism between the sealed container and the external environment. The early-stage pressure-adjusting elements serve as intermediate channels that facilitate gradual pressure equalization, mediating the transition from air-tight sealed state to purged state without requiring complex control systems.
2Ease of operation
If the door is opened under air-tight condition, then contamination is prevented, but the pressure balance process slows down door opening
Solution Approach 1:
The early-stage pressure-adjusting elements perform pressure equalization automatically at the beginning of door opening, before manual intervention is needed. This preliminary pressure adjustment reduces the time required for pressure balance, making door opening easier and faster while maintaining air-tight conditions during the critical sealing phase.
Solution Approach 2:
The pressure equalization process is segmented into early-stage and late-stage phases. The early-stage pressure-adjusting elements handle the initial pressure differential, while the main air-tight sealing elements maintain contamination prevention. This segmentation allows pressure balance to occur in stages, reducing overall door opening time without compromising air-tight integrity.
3Productivity
If more air-exhausting elements are added to speed up purging, then purging time is reduced, but the device complexity increases
Solution Approach 1:
The air-tight device with early-stage pressure-adjusting elements serves multiple functions simultaneously: it maintains air-tight sealing during storage and transport, enables rapid pressure equalization at the beginning of purging, and facilitates efficient gas exchange. This multi-functional design achieves fast purging without requiring separate dedicated pressure-adjusting components, thereby reducing overall device complexity.
Solution Approach 2:
The pressure-adjusting function is merged into the air-tight device structure itself, rather than being implemented as separate external components. The early-stage pressure-adjusting elements are integrated into the door frame and door assembly, combining the sealing and pressure equalization functions into a single unified structure, thereby achieving fast purging without increasing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Significantly reduces purging time and maintains stable, low humidity levels, enhancing the air-tight and purging functions of the container compared to prior art, while facilitating easier door opening under air-tight conditions.
Implementation Method 1
The protruding part has an early-stage pressure-adjusting element configured to exhaust a first gas from the room by pumping a second gas into the room when the door is closed
Data Source
AI summary
A wafer container is provided. The wafer container includes a housing, a door and an air-tight device. The housing has a room with an opening formed therein, and a door frame surrounding the opening. The door fits in the door frame to close the opening. The air-tight device is disposed around the door, located between the door and the door frame, and having a protruding part extending toward the room. The protruding part has an early-stage pressure-adjusting element configured to exhaust a first gas from the room by pumping a second gas into the room when the door is closed.