Wafer Storage Container Edge Support for Bending Resistance

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Solution Overview

Problem

Thin semiconductor wafers are prone to bending and breakage during conveyance due to their own weight or impact, leading to potential damage when stored in conventional substrate storing containers.

Innovation Solution

A substrate storing container with a lid body side substrate support portion and a back side substrate support portion that cooperate to support the edges of substrates in parallel, using cantilever springs with overlapping flat surfaces to minimize bending-induced stress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If substrates are stored in a conventional container without adequate support, then the container structure is simple, but the substrates are prone to bending and breakage due to their own weight or vibration during conveyance

Engineering Contradiction:

Improvesubstrate integrityVSAvoidcontainer structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The container divides substrate support into multiple segments: front retainer on the lid body, back side substrate support portion on the container main body, and lateral substrate support portions on both sides. This segmentation distributes the support function across multiple components, preventing substrate bending while maintaining structural organization

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The support structures are positioned at specific locations where substrates need support: front retainer at the front edge, back side substrate support portion at the rear edge, and lateral substrate support portions at the sides. Each support structure has locally optimized geometry to contact substrate edges without causing stress concentration

Inventive Principle:

Principle #3Local quality

2Reliability

If support bodies are arranged at large pitches to avoid breakage, then substrate breakage is reduced, but the container cannot accommodate substrates with cross-slotting when the lid is closed

Engineering Contradiction:

Improvesubstrate protectionVSAvoidsubstrate arrangement flexibility

Core Design Contradiction:

ReliabilityVSAdaptability or versatility

Solution Approach 1:

The lateral substrate support portions are designed to be movable rather than fixed, allowing them to adapt to different substrate positions and orientations. This dynamic capability enables the container to accommodate substrates with cross-slotting while maintaining protective support

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The combination of front retainer, back side substrate support portion, and lateral substrate support portions creates a universal support system that can handle various substrate configurations including parallel arrangement and cross-slotting, making the container adaptable to different storage needs

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Reliability

If the lid body closes the container opening, then substrate protection is improved, but substrates may experience bending due to cross-slotting or improper support

Engineering Contradiction:

Improvesubstrate protection during conveyanceVSAvoidbending stress on substrates

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The support structures are positioned and configured to counteract bending forces before they can cause damage. The front retainer and back side substrate support portion create a support framework that prevents substrates from bending under their own weight or external forces during conveyance

Inventive Principle:

Principle #9Preliminary anti-action

Solution Approach 2:

The lateral substrate support portions provide cushioning support at the substrate edges, distributing mechanical stresses and preventing concentration of forces that could lead to breakage or damage during handling and conveyance

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents breakage and damage to thin substrates by distributing the bending force evenly, ensuring safe storage and conveyance without substrate deformation.

Implementation Method 1

The lid body side substrate support portion has support flat surfaces respectively configured to contact with peripheral surfaces of edge portions of the plurality of substrates so as to support the substrates

Methodology Applied

Scientific EffectElasticity: Elasticity

Data Source

PatentUS20260026299A1Substrate storing container and lid-body-side substrate support part

Publication Date: 2026.01.22 MIRAIAL CO LTD

AI summary

A substrate storing container includes a lid body side substrate support portion. The lid body side substrate support portion has support flat surfaces respectively configured to contact with peripheral surfaces of the edge portions of the plurality of substrates so as to support the substrates, and the support flat surfaces that contact with the peripheral surfaces of the edge portions of adjacent ones of the plurality of substrates have overlap portions adjacent to each other in a direction parallel to upper surfaces of the substrates.