Automated Semiconductor Wafer Container Unpacking System

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Solution Overview

Problem

Manual handling of semiconductor wafer containers from sealed plastic bags can lead to wafer breakage and safety hazards due to improper handling and the need for manual cutting, which exposes handlers to sharp tools.

Innovation Solution

An automated method and apparatus for unpacking semiconductor wafer containers from sealed bags, involving inflation of the bag with a gas to create a gap, followed by automated cutting and removal of the bag without direct contact with the container, using a cutting device and a bag removing mechanism, and subsequent inspection and transportation of the container.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual handling of semiconductor wafer containers is performed, then flexibility and adaptability are maintained, but wafer breakage risk increases and handling safety deteriorates

Engineering Contradiction:
Improvehandling flexibilityVSAvoidwafer integrity
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The system uses automated mechanisms including robotic arms, conveyor belts, and controlled environment chambers that operate autonomously to handle wafer containers from storage to processing, eliminating manual intervention and its associated risks while maintaining operational flexibility through programmable control

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

Manual mechanical handling is replaced with automated mechanical systems including robotic manipulators, automated guided vehicles, and precision positioning systems that provide consistent, controlled handling operations with reduced risk of human error and wafer damage

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Ease of operation

If manual cutting of sealed bags is performed, then bag removal flexibility is maintained, but handler safety deteriorates due to exposure to sharp tools

Engineering Contradiction:
Improvebag removal flexibilityVSAvoidhandler safety
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

Manual cutting operations are replaced with automated cutting devices including laser cutters, plasma cutters, or automated blade systems that precisely cut sealed bags without requiring human contact with sharp tools, eliminating safety hazards while maintaining cutting flexibility through programmable paths and speeds

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

An automated cutting mechanism serves as an intermediary between the sealed bag and the handler, performing the cutting operation remotely or autonomously so that handlers never directly contact sharp cutting tools, thus eliminating safety risks while maintaining operational flexibility

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If automated unpacking process is implemented, then wafer safety and handler protection are improved, but device complexity increases

Engineering Contradiction:
Improvewafer protectionVSAvoidsystem complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The automated system integrates multiple functions into unified modules: robotic arms perform both grasping and positioning, conveyor systems provide both transport and orientation, and control systems manage both coordination and monitoring, reducing overall system complexity through multi-functional components

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

Separate functions are merged into integrated systems: the storage container and handling mechanism are combined, the cutting device and bag removal are integrated, and control and monitoring are unified into a single automated system that reduces complexity through consolidation

Inventive Principle:
Principle #5Merging (Combining)

4Manufacturing precision

If automated cutting device is used, then cutting precision is improved, but contact with semiconductor container must be avoided to prevent damage

Engineering Contradiction:
Improvecutting precisionVSAvoidcontainer damage risk
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The cutting operation is localized to specific regions of the sealed bag away from the semiconductor container, with the cutting device programmed to cut only the bag material while maintaining a safe distance from the container, thus achieving precise cutting without risking container damage

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The sealed bag itself serves as an intermediary that is cut and removed, creating a barrier between the cutting device and the semiconductor container, allowing precise cutting to occur on the bag without direct contact or risk to the valuable container

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The automated process reduces wafer breakage, enhances operator safety by eliminating manual handling of sharp tools, and improves processing efficiency by automating the unpacking of semiconductor wafer containers and shipping boxes from sealed bags.

Implementation Method 1

the bag is inflated with a gas

Methodology Applied
Scientific EffectGas inflation:

Data Source

PatentUS11605553B2Method and apparatus for unpacking semiconductor wafer container
Publication Date: 2023.03.14 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11605553B2 patent drawing
  • US11605553B2 patent drawing
  • US11605553B2 patent drawing

AI summary

An automated method of unpacking a container containing semiconductor wafers from a sealed bag is provided. The method includes inflating the bag with a gas using an automated gas dispenser. After inflating the bag, the bag is cut using an automated cutting device to expose the container, and the cut bag is removed from around the container.