Wafer Container Seal with Lateral Projections

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Solution Overview

Problem

Conventional wafer containers face issues with seals sticking excessively, providing inconsistent sealing, reduced life expectancy, and leakage during robotic operation and washing, especially when using polycarbonate materials, which are prone to contamination and water retention.

Innovation Solution

A continuous elastomeric seal with lateral projections extending from a central core, designed to fit within a retaining groove, allowing for easy insertion and resisting removal, providing enhanced sealing and minimizing water intrusion during washing without the need for seal removal.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional elastomeric seals are compressed between the door and container portion, then sealing is provided, but the seals stick excessively to the door frame and pull out of the retaining groove during robotic opening

Engineering Contradiction:
Improvesealing consistencyVSAvoiddoor opening operation
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The seal design transitions from simple axial compression to a multi-dimensional engagement system. The C-shaped cross-section with lateral projections creates engagement in radial and lateral dimensions, not just axial compression. This multi-dimensional geometry prevents the seal from sticking to the door frame during robotic opening while maintaining sealing effectiveness.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

Different portions of the seal have specialized functions: the C-shaped core provides axial sealing, while the lateral projections provide lateral sealing and retention. This local differentiation of sealing functions prevents excessive sticking to the door frame while maintaining reliable sealing at critical interfaces.

Inventive Principle:
Principle #3Local quality

2Device complexity

If simple elastomeric seals are used, then the structure is simple, but leakage occurs between the seal and door frame or retaining groove

Engineering Contradiction:
Improveseal structureVSAvoidsealing effectiveness
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The seal is segmented into distinct functional zones: the C-shaped core portion for axial sealing and the lateral projections for lateral sealing and retention. This segmentation allows each portion to address specific leakage paths independently, preventing leakage between the seal and door frame or retaining groove while maintaining manageable structural complexity.

Inventive Principle:
Principle #1Segmentation

3Object-affected harmful factors

If conventional seals are used during washing operations, then water may be trapped between seal and retaining groove, but removing the seal before washing adds operational complexity

Engineering Contradiction:
Improvewater contaminationVSAvoidwashing operation
Core Design Contradiction:
Object-affected harmful factorsVSEase of operation

Solution Approach 1:

The lateral projections are designed to extend beyond the retaining groove walls to preclude water from entering the groove during washing operations. This preliminary protective geometry prevents water contamination before it can occur, eliminating the need to remove the seal before washing and simplifying operational procedures.

Inventive Principle:
Principle #9Preliminary anti-action

4Strength

If polycarbonate materials are used for the container, then structural strength is improved, but the material is prone to contamination and water retention

Engineering Contradiction:
Improvecontainer structural strengthVSAvoidcontamination and water retention
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

The elastomeric seal with lateral projections acts as an intermediary between the polycarbonate door/frame and the external environment. The lateral projections extend beyond the retaining groove to create a barrier that prevents water and contaminant contact with the polycarbonate surfaces, eliminating water retention issues while maintaining the structural benefits of polycarbonate material.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution offers improved sealing performance, longer seal life, and prevents water entry during washing, ensuring effective contamination control and structural integrity without excessive closing pressures.

Implementation Method 1

Conventional seals for both SMIF pods and transport modules have typically been relatively simple elastomeric seals that are simply compressed between the door and container portion in an axial direction to provide the seal.

Methodology Applied
Scientific EffectCompression: Compression

Implementation Method 2

a continuous elastomeric seal extends around the door inward of the periphery. The seal is positioned in a retaining groove extending in an axial direction proximate the perimeter of the door.

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentUS9520310B2Wafer container with door interface seal
Publication Date: 2016.12.13 ENTEGRIS INC
  • US9520310B2 patent drawing
  • US9520310B2 patent drawing
  • US9520310B2 patent drawing

AI summary

A wafer container may be a front opening wafer container comprising a container portion and a door, one of the container portion and the door having a radially installed seal with a plurality of opposing lateral projections that deflect from a normal position in a direction away from an install direction when the seal is installed in a groove, the lateral projections resisting removal of the seal after the seal is seated in the groove. A core portion and a cantilevered finger member engages the other of the door and container portion when the door is seated in the container portion. Other lateral projections on the seal effectively seal the path between the seal and groove surfaces.