Wafer-Level Control Data Logging for Semiconductor Tool Optimization
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Solution Overview
Problem
Existing data management methods for semiconductor wafer production devices do not consider the states of individual wafers or the temporal changes in device conditions, making it impossible to optimize device operations based on these factors.
Innovation Solution
A control device and system that includes a storage unit, command data generation unit, reception data generation unit, and communication unit, which store and manage configuration files that account for wafer states and device temporal changes, enabling optimized operation commands and data logging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If device driving data is divided into multiple files and stored independently as in PTL 1, then processing speed and data compilation ease are improved, but the ability to manage data wafer by wafer and consider wafer states is lost
Solution Approach 1:
The patent segments device driving data into multiple files (device name file, unit name file, operation item name file, setting data file) while introducing wafer identifiers to create a hierarchical structure. This allows both efficient processing through file division and traceability through wafer-by-wafer association, resolving the contradiction between processing speed and adaptability.
Solution Approach 2:
The patent adds a new dimension of wafer identification to the existing file structure. By incorporating wafer identifiers into the setting data file and associating operation items with specific wafers, the system enables wafer-by-wafer management while maintaining the original file-based segmentation for efficient processing.
2Ease of operation
If device driving data is managed without temporal considerations as in PTL 1, then data management simplicity is improved, but the ability to consider temporal changes such as member deteriorations is lost
Solution Approach 1:
The patent introduces log items that record temporal states of device members before failures occur. By preliminarily capturing operational data, temperature, humidity, and other parameters over time, the system enables predictive maintenance and temporal analysis without significantly complicating the data management structure.
Solution Approach 2:
The patent introduces a log file as an intermediary between the device driving data and the setting data file. This log file captures temporal changes and member states, serving as a mediator that records historical information while maintaining the simplicity of the original file-based management system.
3Device complexity
If wafer state information is not integrated into device operations, then device operation independence is improved, but the ability to optimize operations based on wafer states is lost
Solution Approach 1:
The patent merges wafer state information with device operation data by associating wafer identifiers with operation items in the setting data file. This integration allows the system to optimize operations based on wafer states while maintaining relatively simple device operation independence through the file-based architecture.
Data Source
AI summary
A control device for controlling operations of semiconductor wafer production devices for each of target wafers includes a storage unit, a command data generation unit, a reception data generation unit, and a communication unit, the command data generation unit associates transmission destination address with an operation recipe to generate command data representing an operation condition of one semiconductor wafer production device which is to operate or in operation, and the reception data generation unit obtains log data at a predetermined time interval from the semiconductor wafer production device via the communication unit, associate the log data with second steps of log items in series to generate reception data representing an operation state of the semiconductor wafer production device in operation or a wafer state.