Wafer Conveyance in Semiconductor Boats with Nested Columns

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Solution Overview

Problem

In batch processing semiconductor manufacturing, existing apparatuses face challenges in ensuring gas flows primarily between wafers, leading to uneven processing due to gas leakage around and between wafers, particularly when processing wafers of different sizes.

Innovation Solution

The semiconductor manufacturing apparatus incorporates supporting columns positioned inside the outer circumference of boats to minimize gas leakage around wafers, with a wafer conveying apparatus using a lifting arm and conveying arm to efficiently place wafers on the boats, ensuring a short clearance for optimal gas flow between wafers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If supporting columns are positioned outside the boats, then wafer conveyance is easier, but gas leaks around the wafers causing uneven processing

Engineering Contradiction:

Improvewafer conveyanceVSAvoidprocessing uniformity

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

The supporting columns are nested inside the boats rather than positioned outside, creating a contained structure that prevents gas leakage around the wafers while still allowing effective wafer conveyance through the lifting and conveying arms

Inventive Principle:

Principle #7Nested doll (Nesting)

2Ease of operation

If clearance between boats is increased, then wafer conveyance is easier, but gas flows around wafers reducing processing quality

Engineering Contradiction:

Improvewafer conveyanceVSAvoidgas flow control

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

The structure creates different clearance requirements in different locations: tight clearance between boats to control gas flow, while maintaining adequate space for wafer conveyance operations through the lifting and conveying arms

Inventive Principle:

Principle #3Local quality

3Manufacturing precision

If supporting columns are inside the boats, then gas flow between wafers is improved, but wafer conveyance becomes more difficult

Engineering Contradiction:

Improvegas flow controlVSAvoidwafer conveyance

Core Design Contradiction:

Manufacturing precisionVSEase of operation

Solution Approach 1:

The wafer conveyance function is segmented into two separate mechanisms: lifting arms that vertically transport wafers onto the boats, and conveying arms that horizontally position wafers on the boats, allowing independent optimization of gas flow control and conveyance operations

Inventive Principle:

Principle #1Segmentation

4Manufacturing precision

If gas flow between wafers is maximized, then processing uniformity improves, but gas leakage around wafers increases

Engineering Contradiction:

Improveprocessing uniformityVSAvoidgas leakage

Core Design Contradiction:

Manufacturing precisionVSLoss of substance

Solution Approach 1:

The boat structure acts as a flexible containment shell that directs gas flow, creating a configuration where gas is channeled through the intended path between wafers while the boat structure prevents leakage around the wafers

Inventive Principle:

Principle #30Flexible shells and thin films

Data Source

PatentUS10854488B2Wafer conveying apparatus and wafer conveying method

Publication Date: 2020.12.01 KIOXIA CORP

AI summary

A wafer conveying apparatus conveying a wafer onto a supporting table in manufacturing a semiconductor. A first arm retains the wafer to move to an upper region of the supporting table, and is retracted from the upper region of the supporting table after the wafer is elevated. A second arm contacts the wafer by an opening provided in the supporting table to elevate the wafer, and lowers the wafer to place the wafer on the supporting table.