Wafer Cutting Machine Support Surface Shape Correction
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Solution Overview
Problem
Existing cutting machines face issues with support surface shape correction, leading to wobbling cutting blades and widened kerfs, as existing methods risk damaging the support surface during shape confirmation and correction.
Innovation Solution
A cutting machine with a shape storage section, shape measurement unit, determination section, and end face correction device that contactlessly measures and corrects the support surface shape without using a jig, using laser or ultrasonic methods to determine and correct the shape of the support surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a grinding stone is used to correct the support surface shape, then the shape correction is effective, but the support surface may be damaged during the process
Solution Approach 1:
The patent applies preliminary action by performing non-contact measurement of the support surface shape before correction. The laser displacement sensor measures the actual shape of the support surface, and the system calculates the required correction amount in advance, allowing the grinding stone to apply only the necessary correction without excessive material removal that could damage the surface.
Solution Approach 2:
The patent implements feedback control by using the laser displacement sensor to continuously monitor the support surface shape during the correction process. The measured data is fed back to the control unit, which adjusts the grinding stone's position and movement in real-time to achieve precise correction while preventing over-grinding and surface damage.
2Measurement precision
If a jig is brought into contact with the support surface for shape confirmation, then the shape can be determined, but the support surface may be damaged
Solution Approach 1:
The patent replaces the mechanical measurement system (jig contact method) with an optical measurement system. The laser displacement sensor emits laser beams to measure the support surface shape non-contactually, eliminating mechanical contact and the associated risk of surface damage while maintaining high measurement precision.
3Stability of the object's composition
If the support surface shape is not corrected, then the cutting blade rotates without wobble, but the kerf width increases
Solution Approach 1:
The system performs preliminary measurement and calculation of the required support surface correction before actual cutting operations. By pre-correcting the support surface shape based on measured deviations, the cutting blade achieves stable rotation without wobble, thereby maintaining precise kerf width control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and damage-free correction of the support surface shape, preventing kerf widening and ensuring precise cutting without damaging the support surface.
Implementation Method 1
an emitter unit that emits a laser beam toward the support surface in the axial direction of the spindle, and an image sensor that receives reflected light of the laser beam reflected on the support surface
Implementation Method 2
a correction grinding stone arranged such that the correction grinding stone is able to be brought into contact with the support surface
Data Source
AI summary
There is provided a cutting machine for cutting a wafer using a cutting blade. The cutting machine includes a shape storage section, a shape measurement unit, a determination section, and an end face correction device. The shape storage section stores a cross-sectional shape of a support surface, which a mount of a cutting unit has, in an axial direction of a spindle. The shape measurement unit contactlessly measures the cross-sectional shape of the support surface in the axial direction of the spindle. Through a comparison between the cross-sectional shape stored in the shape storage section and the cross-sectional shape measured by the shape measurement unit, the determination section determines whether or not the support surface needs a correction. The end face correction device corrects a shape of the support surface.