Silicon Wafer Dryer with Negative Pressure Air Infiltration
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Solution Overview
Problem
Conventional dryers for silicon wafers face inefficiencies in removing vaporized compounds, leading to saturation and condensation issues due to low air velocity and re-circulated air, which requires frequent maintenance and disrupts the drying process.
Innovation Solution
The dryer design incorporates a tunnel-like enclosure with heating elements, ducts with air discharge openings, and a blower system that maintains a temperature above the saturation point of compounds and creates negative pressure to induce air infiltration, enhancing the removal of vaporized compounds through a coordinated supply and exhaust blower operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If re-circulated forced air is used at low velocities, then energy consumption is reduced, but the efficiency of removing vaporized compounds deteriorates
Solution Approach 1:
The system dynamically adjusts air circulation by introducing fresh air at controlled velocities while maintaining re-circulation, allowing the air flow regime to adapt between energy-saving low-velocity modes and high-efficiency removal modes based on process requirements
Solution Approach 2:
The patent changes the parameters of air flow by introducing fresh air at specific velocities and temperatures, and by controlling the ratio of fresh to recirculated air, thereby optimizing both energy consumption and vapor removal efficiency under different operating conditions
2Duration of action of stationary object
If re-circulated air is used, then air flow continuity is maintained, but vaporized compound removal efficiency deteriorates due to saturation
Solution Approach 1:
The system discards saturated air that has reached its vapor removal capacity and replaces it with fresh air, while maintaining continuous air flow through controlled introduction and mixing, preventing saturation buildup
Solution Approach 2:
The air circulation system dynamically balances between recirculating air for continuity and introducing fresh air for vapor removal, adjusting the mix ratio based on saturation levels to maintain both continuity and efficiency
3Productivity
If air velocity is increased to improve vapor removal, then productivity improves, but energy consumption increases
Solution Approach 1:
The system applies partial fresh air introduction at optimized velocities rather than full-velocity air exchange, providing sufficient vapor removal capability while avoiding excessive energy consumption associated with high-velocity air movement throughout the entire system
4Reliability
If enclosure temperature is maintained above saturation point, then condensation is prevented, but energy consumption increases
Solution Approach 1:
The system uses temperature monitoring and feedback control to maintain enclosure temperature above the saturation point of vaporized compounds, adjusting heating input based on real-time temperature and vapor concentration measurements to prevent condensation while minimizing energy consumption
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents condensation and maintains efficient vaporization by ensuring air infiltration, reducing maintenance needs and ensuring continuous operation by maintaining the enclosure temperature above the saturation point of the compounds.
Implementation Method 1
One or more compounds on and/or within the one or more components is vaporized by the heating elements and/or by the heated air discharged from the plurality of openings
Implementation Method 2
a first and a second heater respectively heat air supplied to the first and the second duct
Implementation Method 3
The supply and the exhaust blowers, in some embodiments of the dryer, cooperatively operate to create a negative pressure within the enclosure for inducing infiltration of air through the first and the second opening
Implementation Method 4
heated air discharged from the plurality of openings in the first and the second duct towards the one or more components
Implementation Method 5
an exhaust blower for extracting fluid from within the enclosure
Data Source
AI summary
A dryer comprising an enclosure and a transporter for transporting one or more components therethrough between a first and a second opening. The dryer includes one or more heating elements and a first and a second duct within the enclosure. The first and said second duct each include a plurality of openings configured for discharging heated air towards the one or more components. An exhaust stack in fluid communication with an interior of the enclosure includes an exhaust blower for extracting fluid from within the enclosure, and one or more heating elements for oxidizing the vaporized compounds. The supply and the exhaust blowers cooperatively operate to induce infiltration of air through the first and the second opening. A method for operating the dryer is also provided.