Wafer Processing Interface for Precise Error Wafer Identification
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Solution Overview
Problem
Current processing apparatuses fail to precisely identify which wafer is defective and where errors occur during fully automatic operation, leading to difficulties in determining the cause of errors and distinguishing between defective and non-defective wafers.
Innovation Solution
The processing apparatus incorporates distinguishing display means on a touch panel to visually differentiate workpieces with errors from those without, allowing easy identification of error-causing wafers and locations within the apparatus, including enlarged cassette displays and distinct representations of workpieces before, during, and after processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If fully automatic operation is implemented, then productivity is improved, but the ability to identify error-causing wafers and error locations deteriorates
Solution Approach 1:
The patent creates visual copies (display images) of wafers and error information on the touch panel. When an error occurs, the system generates a display image showing the specific wafer position, cassette location, and error type, allowing operators to identify error-causing wafers without interrupting automatic operation. This copying approach preserves productivity while restoring error identification capability.
Solution Approach 2:
The touch panel serves as an intermediary between the automatic processing system and the operator. It translates internal error signals into visual display images that show wafer positions, cassette stages, and error locations. This intermediary interface enables error identification without requiring the operator to physically inspect each wafer or interrupt the automatic process.
2Device complexity
If error messages are displayed generically, then device complexity is reduced, but measurement precision of error location deteriorates
Solution Approach 1:
The patent applies local quality by providing specific, localized error information rather than generic messages. The display image shows the exact wafer position, specific cassette stage, and precise error location within the processing apparatus. This localized information approach maintains relatively simple device complexity while dramatically improving error location identification precision.
Data Source
AI summary
A processing apparatus includes a first distinguishing display unit which, when a mechanism making a holding force or a processing force act on a workpiece causes an error, displays a workpiece illustration representing the workpiece to which the error is caused and on which the holding force or the processing force acts distinguishably from another workpiece illustration. The workpiece on which the holding force or the processing force of the mechanism causing the error acts can be thereby identified easily.