Wafer Expanding Cover Structure for Clean Chip Separation
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Solution Overview
Problem
The existing expanding apparatus faces challenges such as heating of the holding table, risk of the sheet coming off the table, and foreign matter adhering to the workpiece due to sheet heating.
Innovation Solution
The apparatus includes a frame fixing part, a holding table, an expanding unit, a heating unit, and a cover that covers the workpiece when heated, along with suction holes to capture sheet dust and foreign matter.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the sheet is heated by blowing hot air over the loosened region, then the sheet shrinks and the interval between chips is kept, but mist, gas, and foreign matter are generated from the sheet and adhere to the workpiece
Solution Approach 1:
A cover is introduced as an intermediary component between the heating unit and the workpiece. The cover allows hot air to pass through for heating the sheet while simultaneously preventing generated foreign matter from adhering to the workpiece surface, thus resolving the contradiction between maintaining chip intervals and preventing contamination
Solution Approach 2:
The heating process that generates harmful foreign matter is converted into a beneficial process by using the cover to capture and redirect these byproducts away from the workpiece, transforming the harmful heating side effect into a controlled process that achieves both sheet shrinkage and workpiece protection
2Productivity
If the holding table temperature is set low to tear the die attach film, then the film can be torn during expansion, but the heater heat raises the holding table temperature and causes waiting time
Solution Approach 1:
The system is segmented into distinct functional zones: the heating unit operates independently above the sheet while the holding table maintains its low temperature separately below. This spatial segmentation allows the heater to heat the sheet without necessarily heating the holding table, reducing waiting time and improving productivity
Solution Approach 2:
The sheet itself acts as an intermediary that receives heat from the heater while being held on the cooled holding table. This allows the die attach film to be torn through thermal expansion of the sheet without the holding table temperature interfering with the process
3Manufacturing precision
If the sheet shrinks due to heating, then the interval between chips is maintained, but the outer circumferential part may pull and come off the holding table causing chips to move and collide
Solution Approach 1:
The cover provides localized protection and constraint at the outer circumferential region where shrinkage forces are strongest. By reinforcing this specific area, the sheet maintains its grip on the holding table during shrinkage, preventing chips from moving or colliding while still allowing interval maintenance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration prevents the holding table from being heated, reduces the risk of the sheet coming off, and effectively captures foreign matter generated during heating, ensuring the workpiece remains clean and securely held.
Implementation Method 1
a heating unit that heats the sheet between an outer circumferential side of the workpiece and an inner circumferential edge of the annular frame
Implementation Method 2
a suction hole connected to an air suction source is formed in the frame fixing part, and the suction hole sucks sheet dust generated due to heating of the sheet
Data Source
AI summary
An expanding apparatus includes a frame fixing part that fixes an annular frame of a workpiece unit, a holding table that holds a workpiece, an expanding unit that expands a sheet, a heating unit that heats the sheet between an outer circumferential side of the workpiece and an inner circumferential edge of the annular frame, and a cover that covers the workpiece held by the holding table. The cover covers the workpiece when the sheet is heated by the heating unit.