Wafer Table Feeder Member With Cu-Mo Welded Intermediary
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing feeder members for wafer placement tables in etching, ion implantation, and electron-beam exposure devices suffer from insufficient joining strength and electrical conduction failures due to the formation of gaps at the interface between Mo and Cu components, leading to potential damage and malfunction.
Innovation Solution
A feeder member design that uses a high-melting-point metal electrode-side terminal joined directly to a Cu-containing intermediate member, with a Cu-containing cable support member and cable, eliminating the need for brazing materials and ensuring strong connections through laser or electron beam welding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If electrode-beam welding or laser-beam welding is used to join Cu cable to Mo electrode-side terminal, then the joining process is simplified and automation is improved, but the joining strength is insufficient and electrical conduction failure occurs due to pore formation at the interface
Solution Approach 1:
The patent introduces an intermediate member made of high-melting-point metal (Mo, W, or Ta) that serves as a mediator between the Cu cable and the Mo electrode-side terminal. This intermediate member is directly joined to both components through welding, creating a three-layer structure (Mo terminal - intermediate member - Cu cable) that ensures reliable electrical conduction while maintaining automation of the welding process. The intermediate member prevents pore formation and interface failures that occur in direct Cu-Mo welding.
2Device complexity
If direct welding between Mo and Cu is performed without intermediate member, then the device complexity is reduced, but the joining strength is insufficient due to poor metallurgical bonding between dissimilar metals
Solution Approach 1:
The patent employs a composite structure consisting of three different metal materials (Mo electrode-side terminal, high-melting-point metal intermediate member, and Cu cable) joined together through welding. This composite approach leverages the advantageous properties of each material: Mo provides compatibility with the electrode, the intermediate member provides high-temperature stability and strong bonding capability, and Cu provides excellent electrical conductivity. The composite structure achieves superior joining strength while maintaining reasonable device complexity.
3Ease of manufacture
If brazing material is used to join the electrode-side terminal and cable, then the joining process is simplified, but the electrical conduction reliability deteriorates due to additional interface layers and potential contamination
Solution Approach 1:
The patent extracts and eliminates the brazing material from the joining process, replacing it with direct welding between metal components. By removing the brazing material layer, the invention reduces the number of interface layers and potential sources of contamination, thereby improving electrical conduction reliability. The joining process achieves both simplicity and reliability through direct metallurgical bonding via welding of the electrode-side terminal, intermediate member, and cable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design provides enhanced strength and reduces the likelihood of electrical conduction failures, maintaining reliable electrical connections and preventing damage to the wafer placement table components.
Implementation Method 1
the upper end of the cable made of Cu may be inserted into the hole to join them by electrode-beam welding or laser-beam welding
Implementation Method 2
the upper end of the cable made of Cu may be inserted into the hole to join them by electrode-beam welding or laser-beam welding
Implementation Method 3
a step of welding and integrating the cable support member and the end surface of the end of the cable together by radiating a beam (a laser beam, an electron beam, or the like)
Implementation Method 4
a step of welding and integrating the cable support member and the end surface of the end of the cable together by radiating a beam (a laser beam, an electron beam, or the like)
Data Source
AI summary
A feeder member is used to supply electricity to an electrode embedded in a ceramic base. The feeder member includes an electrode-side terminal that is made of a high-melting-point metal containing material and joined to the electrode, an intermediate member that is made of a Cu containing material and directly joined to the electrode-side terminal without using a brazing material, a cable support member that is made of a Cu containing material and joined to the intermediate member, and a cable that is made of a Cu containing material and that has one end whose end surface is welded to the cable support member.