Wafer Frame Sorting and Storage With Robotic Tracking
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Solution Overview
Problem
The manual sorting and stocking of wafer frames carrying semiconductor wafers are prone to misplacement and breakage, posing challenges in efficient storage and transport.
Innovation Solution
An automated wafer frame sorting and stocking system that includes a robot arm, storage towers, and a control system to manage the sorting, tracking, and retrieval of wafer frames, eliminating the need for human handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual sorting and stocking of wafer frames is performed, then human flexibility and adaptability are utilized, but misplacement and breakage occur reducing reliability
Solution Approach 1:
The patent replaces manual mechanical handling with an automated robot arm system that uses mechanical grippers to pick up and place wafer frames. The robot arm operates under computer control to transfer wafer frames between cassettes and storage locations, eliminating human handling while maintaining precise control through automated mechanical systems.
Solution Approach 2:
The system enables self-service through automated identification and sorting. The scanner automatically reads identifiers on wafer frames, the control system processes this information to determine proper storage locations, and the robot arm autonomously performs the sorting and stocking operations without requiring human intervention for each individual frame.
2Reliability
If automated sorting and stocking system is implemented, then misplacement and breakage are reduced improving reliability, but system complexity increases
Solution Approach 1:
The robot arm system serves multiple functions: it picks up wafer frames from cassettes, transports them to storage locations, places them in storage, and can retrieve them when needed. The same robotic mechanism handles both sorting (organizing by identifier) and stocking (storing in designated locations), reducing the need for separate specialized equipment.
Solution Approach 2:
The control system acts as an intermediary between the scanner/identifier system and the robot arm. It processes identification data, determines appropriate storage locations based on predefined criteria, and translates this into commands for the robot arm, thereby managing system complexity through centralized intelligent control.
3Manufacturing precision
If precise sorting and stocking is achieved through automation, then misplacement is reduced, but manufacturing complexity increases
Solution Approach 1:
The system incorporates a scanner that reads identifiers on wafer frames and provides feedback to the control system. This feedback loop ensures that each wafer frame is correctly identified and routed to the appropriate storage location, maintaining high sorting precision through automated verification and correction capabilities.
Data Source
AI summary
A wafer sorting and stoking system provides automated storage and retrieval of wafer frames carrying semiconductor wafers. A wafer frame cassette is received at a transfer port from a transfer system. A robot arm retrieves the wafer frames from the cassette and stores each wafer frame in a respective storage slot in one of a plurality of storage towers. The storage location of each wafer frame is recorded. Each wafer frame can be selectively retrieved and loaded into a wafer frame cassette by the robot arm for further processing.