Wafer Handler Storage Layout for Faster Filler Wafer Supply
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Solution Overview
Problem
The existing wafer processing apparatus faces challenges in efficiently handling filler and test wafers, leading to reduced storage capacity and throughput due to the need for additional space and time-consuming transfers, which affect the overall efficiency of the system.
Innovation Solution
The apparatus incorporates a wafer storage within the wafer handler chamber, allowing direct transfer of filler and test wafers to and from the wafer boat, optimizing the use of cassette space and reducing transfer time by integrating a wafer handler that can access both wafer storage and cassettes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If filler and test wafers are transferred from cassettes during each load, then the supply of filler and test wafers is provided, but the transfer time increases and throughput is reduced
Solution Approach 1:
Filler and test wafers are pre-loaded into the wafer handler chamber's storage area in advance, before the actual production wafer loading process. This preliminary action ensures that when production wafers need to be loaded, the filler and test wafers are already in position and do not require time-consuming transfers from cassettes during the critical loading phase, thereby maintaining high throughput.
Solution Approach 2:
The patent extracts the filler and test wafer storage function from the cassette system and places it in the wafer handler chamber. This extraction separates the handling of filler/test wafers from production wafers, allowing filler and test wafers to be made available without requiring cassette door opening and transfer operations during production wafer loading, thus eliminating time loss and maintaining throughput.
Data Source
AI summary
The disclosure relates to an apparatus for processing wafers with a process chamber to process wafers held in a wafer boat; a cassette handler chamber to handle wafer cassettes; and, a wafer handler chamber provided with a wafer handler to transfer wafers from wafer cassettes to the wafer boat. The wafer handler is constructed and arranged to transfer wafers between a wafer storage, the wafer boat and wafer cassettes.