Wafer Holder Notch Slider for Rear-Side Liquid Suppression
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in preventing liquid from reaching the rear surface of semiconductor wafers during brush processing, leading to contamination and particle generation due to inadequate inert gas flow control and notch design.
Innovation Solution
The apparatus incorporates a substrate holder with a disk-shaped plate and notches, featuring sliding members and operating members to manage lift pins and gas flow, ensuring effective inert gas diversion and suppression of liquid flow to the rear surface through a slider mechanism that blocks and opens notches to allow lift pin movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If notches are formed in the plate to allow lift pins to pass through, then substrate transfer is enabled, but liquid can reach the rear surface of the substrate causing contamination
Solution Approach 1:
The slider is positioned in advance to block the notches before substrate transfer, preventing liquid from reaching the rear surface. The slider moves to open the notches only when substrate transfer is required, thus preliminarily preventing contamination while enabling transfer when needed.
Solution Approach 2:
The slider acts as an intermediary component that controls the opening and closing of notches. It mediates between the need for substrate transfer (open notches) and the need to prevent liquid contamination (closed notches), allowing selective opening/closing based on operational requirements.
2Reliability
If multiple separate operating mechanisms are provided for controlling lift pins, sliding members, and notches, then precise control is achieved, but device complexity increases
Solution Approach 1:
Multiple operating mechanisms for controlling lift pins, sliding members, and notches are merged into a single integrated operating mechanism. This single mechanism simultaneously controls all components, reducing the total number of parts while maintaining precise control through coordinated motion of all elements.
Solution Approach 2:
The single operating mechanism is designed with multi-functionality, enabling it to perform multiple tasks: controlling lift pin movement, sliding member positioning, and notch opening/closing. This universal mechanism replaces multiple specialized mechanisms, simplifying the overall device structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration efficiently suppresses liquid flow to the rear surface, reducing particle generation and contamination, while minimizing component count and manufacturing costs by integrating operating mechanisms with a single elevating member.
Implementation Method 1
multiple sliding members provided on the plate of the substrate holder and configured to be slid in a horizontal direction
Implementation Method 2
multiple operating members provided below the plate of the substrate holder to be moved up and down and allowed to be respectively engaged with the sliding members
Implementation Method 3
multiple lift pins configured to support a periphery of the substrate from below, and configured to be moved up and down through the notches of the plate
Implementation Method 4
a rotational driver configured to rotate the substrate holder around a vertical axis
Data Source
AI summary
A substrate processing apparatus includes a substrate holder having a plate positioned below a substrate; and substrate gripping members provided on a periphery of the plate, the plate having notches at the periphery thereof; a rotational driver; lift pins configured to support a periphery of the substrate from below and configured to be moved up and down; sliding members provided on the plate to be slid in a horizontal direction, each of the sliding members being configured to be moved between a closing position where the notch is closed and an opening position where the notch is opened to allow the lift pin to be moved up and down through the notch; and operating members configured to be moved up and down, each of the operating members being configured to slide the sliding member by being moved up and down while being engaged with the sliding member.