Wafer ID Recognition with Auto Activation and Multi-Angle Imaging

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Solution Overview

Problem

Conventional wafer identification devices require manual operation for turning on and off light sources and image capturing units, are susceptible to environmental interference, and struggle with recognizing wafer numbers from different angles and mixed batches without prior font training.

Innovation Solution

A device with a control unit that automatically turns on and off light sources and image capturing units, using multiple image capturing units to capture images from various angles and employing Simplified Swarm Optimization and convolutional neural networks for font-independent recognition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual operation is used to turn on and off light sources and image capturing units, then the device structure can be simple, but the operation becomes troublesome and productivity decreases

Engineering Contradiction:
Improveoperation convenienceVSAvoidproduction speed
Core Design Contradiction:
Ease of operationVSProductivity

Solution Approach 1:

The system automatically detects the presence of a wafer boat and activates/deactivates the light source and image capturing units without manual intervention. When the wafer boat is placed on the placing portion, the system automatically turns on the light source and image capturing units, and when removed, it automatically turns them off, making the system serve itself.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system uses a sensor to detect whether the wafer boat is present on the placing portion, and based on this feedback signal, the control unit automatically controls the activation or deactivation of the light source and image capturing units, creating a closed-loop control system.

Inventive Principle:
Principle #23Feedback

2Measurement precision

If a single image capture unit is used, then the device structure can be simple, but the recognition effect is poor due to environmental interference

Engineering Contradiction:
Improverecognition accuracyVSAvoiddevice structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The image capturing function is divided into multiple independent image capturing units positioned at different locations and angles. Each unit captures images from its specific viewpoint, and the control unit integrates these multiple images to achieve accurate recognition that is resistant to environmental interference.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Image capturing units are arranged in three-dimensional space at different positions and angles around the wafer boat placing portion, capturing images from multiple spatial dimensions. This multi-angle approach provides comprehensive coverage and makes the system robust against environmental disturbances from any single direction.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If OCR is reconfigured and trained for different batches of wafers, then accurate recognition can be achieved, but production speed is greatly affected and inspection becomes a bottleneck

Engineering Contradiction:
Improverecognition accuracyVSAvoidproduction speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The control unit is designed with universal image recognition capabilities that can identify wafer identification numbers from different suppliers and batches without requiring reconfiguration or training. The system processes images from multiple image capturing units and uses pattern recognition algorithms to universally identify various wafer types.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system performs preliminary image capture and processing by capturing images from multiple angles simultaneously, and the control unit pre-processes these images to extract identification information quickly, enabling rapid recognition without time-consuming reconfiguration for each batch.

Inventive Principle:
Principle #10Preliminary action

4Measurement precision

If a single light source is used, then the device structure can be simple, but the image quality is insufficient under varying environmental lighting conditions

Engineering Contradiction:
Improveimage qualityVSAvoidlighting system
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The lighting system is divided into multiple independent light sources positioned at different locations. Each light source illuminates the wafer boat placing portion from its specific position, ensuring that at least one light source provides adequate illumination regardless of the viewing angle or environmental lighting conditions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Light sources are positioned in three-dimensional space around the wafer boat placing portion, providing illumination from multiple spatial dimensions and angles. This multi-directional lighting ensures consistent image quality for the image capturing units regardless of environmental lighting variations.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS12068182B2Device for recognizing wafer identification number with automatically turning on and off recognizing function
Publication Date: 2024.08.20 NATIONAL TSING HUA UNIVERSITY
  • US12068182B2 patent drawing
  • US12068182B2 patent drawing
  • US12068182B2 patent drawing

AI summary

A device for recognizing wafer identification number with automatically turning on and off recognizing function comprises a base, a support frame, a light source, a plurality of image capturing units, an image recognition unit and a control unit. The base comprises a wafer boat placing portion and a first switch disposed on the wafer boat placing portion. The light source and the image capturing units are disposed on the support frame. The control unit is electrically connected to the first switch, the light source, the image capturing units and the image recognition unit. As such, the device for recognizing wafer identification number with automatically turning on and off recognizing function can automatically turn on and off the light source, the image capturing units, and the image recognition unit, therefore the operation is very easy and convenience.