Wafer inspection apparatus

Solution Overview

Problem

Wafer inspection apparatuses with multiple inspection parts arranged in a height and width direction face space constraints and complexity due to the need for multiple fan filter units and control systems.

Innovation Solution

A wafer inspection apparatus with air circulating means at both ends of a longitudinal air circulating region, which efficiently circulates air and maintains cleanliness while reducing space requirements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If fan filter units are installed in each inspection part, then cleanliness of the inspection part is maintained, but installation space increases and device complexity increases

Engineering Contradiction:

Improvecleanliness of inspection partVSAvoidcomplexity of control system

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

Multiple fan filter units are merged into a single air circulating means that is shared across all inspection parts. The air circulating means includes a fan and filter unit that circulates air through all inspection parts collectively, eliminating the need for separate control systems for each individual fan filter unit while maintaining cleanliness in all inspection areas.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The air circulating means is designed as a universal system that serves multiple inspection parts simultaneously. This single air circulating means performs the function of multiple individual fan filter units by circulating air through all inspection parts, reducing both the number of components and control systems required.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Object-affected harmful factors

If fan filter units are installed in each inspection part, then cleanliness of the inspection part is maintained, but installation space increases

Engineering Contradiction:

Improvecleanliness of inspection partVSAvoidinstallation space

Core Design Contradiction:

Object-affected harmful factorsVSArea of stationary object

Solution Approach 1:

Multiple fan filter units are merged into a single air circulating means that is shared across all inspection parts. The air circulating means includes a fan and filter unit that circulates air through all inspection parts collectively, eliminating the need for separate control systems for each individual fan filter unit while maintaining cleanliness in all inspection areas.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The air circulating means is designed as a universal system that serves multiple inspection parts simultaneously. This single air circulating means performs the function of multiple individual fan filter units by circulating air through all inspection parts, reducing both the number of components and control systems required.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively maintains cleanliness and reduces space usage in wafer inspection apparatuses with multiple inspection parts, enhancing inspection efficiency and simplicity.

Implementation Method 1

a pair of air circulating means disposed at both ends in a longitudinal direction of an air circulating region including the plurality of inspection parts arranged in the lateral direction and configured to circulate air in the circulating region

Methodology Applied

Scientific EffectAir circulation: Convection

Data Source

PatentUS11515175B2Wafer inspection apparatus

Publication Date: 2022.11.29 TOKYO ELECTRON LTD

AI summary

A wafer inspection apparatus according to one embodiment is a wafer inspection apparatus including a plurality of inspection parts arranged in a height direction and a lateral direction, and includes a pair of air circulating means disposed at both ends in a longitudinal direction of an air circulating region including the plurality of inspection parts arranged in the lateral direction and configured to circulate air in the circulating region.