Wafer-Level Micro-Optics Integration on VCSELs

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Solution Overview

Problem

Conventional methods for integrating micro-optics with surface-emitting laser diodes (VCSELs) are complex, expensive, and not easily scalable, often resulting in destruction of active alignment during adhesive curing and requiring individual processing and positioning, which limits cost-effectiveness and scalability.

Innovation Solution

A wafer-level operation method where micro-optics are directly positioned and produced on VCSELs, using unfunctionalized photopolymers applied to the wafer, with imprinting of optical functions and bonding with an adhesive layer to create durable, scalable, and cost-effective optics, including transmission holograms, diffractive, and focusing lenses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional individual processing and positioning methods are used, then micro-optics can be positioned on VCSELs, but the process becomes complex and expensive

Engineering Contradiction:
Improvemicro-optics positioning precisionVSAvoidprocessing process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent merges multiple individual processing steps into a single wafer-level operation. Instead of processing each VCSEL individually, the method processes entire wafers containing multiple VCSELs simultaneously, integrating micro-optics production and positioning into one unified process that reduces complexity while maintaining precision

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent creates a universal wafer-level processing method that can handle multiple VCSELs simultaneously. The single-sided V-groove structure serves multiple functions: it provides mechanical support, enables precise positioning, and facilitates batch processing of numerous VCSELs on one wafer, making the process scalable and cost-effective

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Manufacturing precision

If adhesive bonding with active alignment is used, then micro-optics can be positioned on VCSELs, but the active alignment may be destroyed during adhesive curing

Engineering Contradiction:
Improveactive alignment precisionVSAvoidalignment stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent performs preliminary positioning of micro-optics into the single-sided V-grooves before any adhesive bonding or curing processes. The V-grooves are pre-formed with precise dimensions and orientations, allowing micro-optics to be mechanically secured in the correct position before final bonding, thereby preserving alignment throughout the curing process

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The single-sided V-grooves serve as an intermediary structure between the VCSEL substrate and the micro-optics. These grooves provide a mechanical interface that maintains precise alignment and positioning, acting as a stable mediator that prevents direct contact between adhesives and the aligned micro-optics, thus protecting the alignment during curing

Inventive Principle:
Principle #24Intermediary (Mediator)

3Manufacturing precision

If conventional processing methods are used, then micro-optics can be produced, but scalability is limited and production expenditure increases

Engineering Contradiction:
Improvemicro-optics production precisionVSAvoidproduction scalability
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent combines multiple VCSEL processing operations into a single wafer-level process. Entire wafers containing multiple VCSELs are processed simultaneously for micro-optics production and positioning, dramatically increasing throughput and scalability while maintaining the same precision as individual processing would provide

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent segments the wafer into multiple individual VCSEL regions, each with its own single-sided V-groove structure. This segmentation allows batch processing of many VCSELs simultaneously while maintaining individual precision control for each VCSEL-micro-optics pair, enabling both high productivity and manufacturing precision

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables cost-effective and scalable production of VCSELs with integrated optics, achieving precise and durable micro-optics that can be adapted to specific VCSEL characteristics, suitable for applications like smart glasses with high hologram precision and reduced production expenditure.

Implementation Method 1

bonding with an adhesive layer to create durable, scalable, and cost-effective optics

Methodology Applied
Scientific EffectAdhesive bonding: Adhesive

Implementation Method 2

applying unfunctionalized photopolymers applied to the wafer, with imprinting of optical functions

Methodology Applied
Scientific EffectPhotopolymerization: Photopolymerisation

Data Source

PatentUS20230118706A1Method for producing micro-optics on surface-emitting laser diodes (VCSEL)
Publication Date: 2023.04.20 ROBERT BOSCH GMBH
  • US20230118706A1 patent drawing
  • US20230118706A1 patent drawing
  • US20230118706A1 patent drawing

AI summary

A method for producing micro-optics on surface-emitting laser diodes. In a wafer-level operation, the micro-optics are preferably positioned directly on the VCSEL's forming, in each instance, a part of a coherent wafer.