Wafer-Level Underfill Mold with Variable Ports

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Solution Overview

Problem

Conventional molding methods, such as compression and transfer molding, face challenges in uniformly dispensing underfill materials between stacked package components, especially when dealing with round wafers, leading to non-uniformity and the need for separate steps for underfill dispensing.

Innovation Solution

A wafer-level molding apparatus and method that uses a mold with a top portion and edge ring, featuring injection ports of varying sizes and air vents, allowing simultaneous underfill dispensing and over-molding in a single step, with controlled injection timing and vacuuming to prevent air bubbles and ensure uniform material distribution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If compression molding is used for over-molding, then the molding process can be performed, but separate steps are needed for underfill dispensing

Engineering Contradiction:
Improvemolding process capabilityVSAvoidprocess integration
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent combines underfill dispensing and over-molding operations into a single integrated process step. The molding compound is formulated to include both the underfill material and the molding compound, allowing simultaneous filling of gaps between stacked dies and over-molding in one operation, thereby eliminating separate underfill dispensing steps

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The invention uses a composite material system where the molding compound incorporates underfill material properties. This composite formulation enables the material to perform dual functions: filling gaps between package components (underfill function) and providing protective molding (over-molding function)

Inventive Principle:
Principle #40Composite materials

2Productivity

If transfer molding is used to fill underfill and molding compound simultaneously, then process integration is achieved, but non-uniform dispensing occurs on round wafers

Engineering Contradiction:
Improveprocess integrationVSAvoidmaterial distribution uniformity
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent implements non-uniform port sizing where injection ports at different locations have different dimensions. Ports closer to the center of round wafers are larger, while peripheral ports are smaller, compensating for varying flow paths and ensuring uniform material distribution across the entire wafer surface

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The invention modifies the physical parameters of the injection system by varying port sizes and configurations based on location. This parameter adjustment compensates for geometric variations in round wafers, ensuring consistent filling patterns and uniform material distribution regardless of wafer shape

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If conventional molding methods are used, then underfill dispensing can be performed, but non-uniform dispensing occurs between stacked package components

Engineering Contradiction:
Improveunderfill dispensing capabilityVSAvoidunderfill distribution uniformity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent divides the injection system into multiple separate injection ports distributed across the mold cavity. This segmentation allows independent control and optimization of material flow to different regions, ensuring uniform underfill distribution between stacked package components through coordinated multi-port injection

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables uniform dispensing of molding material across the wafer, reducing void formation and achieving efficient underfill and over-molding in a single process step, suitable for both round and non-round wafers, improving packaging efficiency in integrated circuit assembly.

Implementation Method 1

a vacuum system connected to the air vents, the vacuum system being configured to vacuum the inner space

Methodology Applied
Scientific EffectVacuum: Vacuum

Implementation Method 2

A plurality of injection ports is connected to the inner space of the mold

Methodology Applied
Scientific EffectInjection molding:

Data Source

PatentUS11024618B2Wafer-level underfill and over-molding
Publication Date: 2021.06.01 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11024618B2 patent drawing
  • US11024618B2 patent drawing
  • US11024618B2 patent drawing

AI summary

A mold includes a top portion, and an edge ring having a ring-shape. The edge ring is underlying and connected to edges of the top portion. The edge ring includes air vents. The edge ring further encircles the inner space under the top portion of the mold. A plurality of injection ports is connected to the inner space of the mold. The plurality of injection ports is substantially aligned to a straight line crossing a center of the top portion of the mold. The plurality of injection ports has different sizes.