Wafer Load Port Switching Assembly for Multi-Size FOUP Handling

Solution Overview

Problem

The existing semiconductor manufacturing process requires multiple load ports for different FOUP sizes, leading to space inefficiency, increased costs, and complicated wafer transportation lines due to the need for multiple load ports to accommodate varying wafer sizes.

Innovation Solution

A wafer load port designed with a movable load station and a switch assembly featuring two embedding units that can selectively connect to FOUPs of different sizes, allowing a single load port to accommodate both, and includes a slide cover to isolate the embedding units during switching, preventing contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple load ports are added to accommodate different FOUP sizes, then the wafer load port can handle various wafer sizes, but the space in the wafer fab is wasted and the wafer transportation line becomes complicated

Engineering Contradiction:

Improvecompatibility with different FOUP sizesVSAvoidwafer transportation line complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The load port is designed with a universal structure that can accommodate both 8-inch and 12-inch FOUPs using the same embedding units, eliminating the need for separate load ports for different wafer sizes. The mounting base with standardized opening part and the movable load station enable a single load port to perform multiple functions.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the functionality of multiple size-specific load ports into a single unified load port. The switch assembly integrates both first and second embedding units that can selectively connect to different FOUP sizes, combining what would have been separate devices into one consolidated unit.

Inventive Principle:

Principle #5Merging (Combining)

2Adaptability or versatility

If multiple load ports are added to accommodate different FOUP sizes, then the wafer load port can handle various wafer sizes, but the cost increases

Engineering Contradiction:

Improvecompatibility with different FOUP sizesVSAvoidnumber of load ports required

Core Design Contradiction:

Adaptability or versatilityVSQuantity of substance

Solution Approach 1:

The load port is designed with a universal structure that can accommodate both 8-inch and 12-inch FOUPs using the same embedding units, eliminating the need for separate load ports for different wafer sizes. The mounting base with standardized opening part and the movable load station enable a single load port to perform multiple functions.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the functionality of multiple size-specific load ports into a single unified load port. The switch assembly integrates both first and second embedding units that can selectively connect to different FOUP sizes, combining what would have been separate devices into one consolidated unit.

Inventive Principle:

Principle #5Merging (Combining)

3Ease of operation

If the embedding units are exposed during switching, then the switching operation is simple, but the switch assembly becomes contaminated

Engineering Contradiction:

Improveswitching operation simplicityVSAvoidcontamination of switch assembly

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The slide cover is moved to the closed position before the embedding units are switched, preventing contamination from occurring in the first place. This preliminary protective action ensures that the switch assembly remains isolated from the external environment throughout the switching operation.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The slide cover acts as an intermediary barrier between the embedding units and the external environment. It provides physical isolation that prevents contaminants from reaching the switch assembly while still allowing the embedding units to function when needed.

Inventive Principle:

Principle #24Intermediary (Mediator)

Data Source

PatentUS20250349588A1Wafer load port

Publication Date: 2025.11.13 SHENG CHUAN TECHNOLOGY CO LTD

AI summary

A wafer load port is configured to load a FOUP, and the wafer load port has a mounting base, a load station, an opening part, a board, and a switch assembly. The load station is mounted on the top surface and is configured to load the FOUP. The opening part is mounted on a lateral side surface of the mounting base. An opening is formed through the opening part, and the opening is adjacent to the load station. The board may close the opening of the opening part. The switch assembly is mounted on the board and has a first embedding unit and a second embedding unit. The first embedding unit and the second embedding unit are located at different horizontal locations, and the first embedding unit and the second embedding unit are movable between a connection position and a waiting position.