Inter-Site Wafer Lot Backup Routing for Fab Disruptions
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Solution Overview
Problem
Existing manufacturing execution systems (MES) do not provide efficient backup routing between different semiconductor fab sites, considering factors like manufacturing constraints, weather, traffic, and power supply, leading to inefficiencies in semiconductor wafer processing.
Innovation Solution
An inter-site backup management system and method that utilizes an MES apparatus to optimize routing between semiconductor fab sites by considering site availability, transportation vehicle status, traffic conditions, weather forecasts, and MES information, employing machine learning to determine efficient auxiliary routes using a database and machine learning model.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If traditional MES systems are used for routing, then system simplicity is maintained, but routing efficiency and production output are insufficient
Solution Approach 1:
The system segments routing decisions into multiple components: real-time factors (tool status, queue depth), environmental factors (weather, traffic), and machine learning predictions. This segmentation allows complex routing optimization without overwhelming system complexity by breaking down the decision-making process into manageable modules.
Solution Approach 2:
The patent introduces an intermediary routing management system that acts as a mediator between the MES and transportation vehicles. This intermediary layer processes multiple input factors (weather, traffic, tool status) and generates optimized routing decisions, thereby improving productivity without directly complicating the core MES system.
2Reliability
If auxiliary routing is not provided, then system operation is simple, but backup capability and reliability are insufficient
Solution Approach 1:
The system performs preliminary actions by pre-calculating auxiliary routes and preparing backup options before disruptions occur. By using machine learning to predict potential issues and pre-establish alternative routing paths, the system ensures reliability is improved while maintaining ease of operation during actual disruptions.
Solution Approach 2:
The patent changes routing parameters dynamically based on multiple factors including weather conditions, traffic patterns, and tool availability. By adjusting routing parameters in real-time rather than using fixed routes, the system achieves both reliability through backup capabilities and operational simplicity through automated parameter adjustment.
3Productivity
If real-time routing optimization is implemented, then production efficiency is improved, but data processing requirements and system complexity increase
Solution Approach 1:
The system extracts only the most critical data elements for routing decisions, such as tool status, queue depth, weather conditions, and traffic patterns. By filtering and extracting only essential information rather than processing all available data, the system improves production efficiency while minimizing data processing requirements and preventing information overload.
Data Source
AI summary
A method includes: receiving an auxiliary routing request from a manufacturing execution system (MES) apparatus of a first site by an inter-site backup management apparatus; selecting an auxiliary route to a second site based on the auxiliary routing request and a statistical model by the inter-site backup management apparatus; including the auxiliary route in a route associated with a wafer lot by the MES apparatus; and performing a semiconductor processing operation on a wafer of the wafer lot according to the route.