Wafer Liquid Nozzle Layout With Shared Guide and Compact Cup
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Solution Overview
Problem
Current semiconductor wafer processing apparatuses lack efficient mechanisms for simultaneously handling multiple processing liquids and maintaining a compact design, which limits their ability to perform diverse processing tasks and increase throughput.
Innovation Solution
The apparatus features multiple processors with dedicated and shared movers, nozzles, and a cup design that allows for the efficient supply and management of different processing liquids, including a shared guide rail for movers and a cup configuration that adjusts height and notches to prevent liquid leakage and nozzle interference, enabling the use of various nozzles for different processing tasks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple processing nozzles are provided for different processing liquids, then processing versatility is improved, but device complexity increases
Solution Approach 1:
The patent implements a shared guide structure that serves multiple processing nozzles (first processing nozzle and second processing nozzle) simultaneously. This guide structure allows different nozzles handling different processing liquids to move along a common path, enabling one structural component to fulfill multiple functions and reducing overall device complexity while maintaining processing versatility
Solution Approach 2:
The patent combines multiple nozzle movement functions into a single shared guide structure. Instead of providing separate guides for each nozzle, the system merges the guidance functions into one common structure that accommodates multiple nozzles, thereby reducing the number of components and simplifying the device architecture
2Adaptability or versatility
If multiple movers are provided for different nozzles, then processing flexibility is improved, but device height increases
Solution Approach 1:
The patent transitions from vertical stacking of multiple movers (which would increase device height) to a horizontal arrangement where multiple movers operate along a shared guide structure. By changing the spatial dimension of mover arrangement from vertical to horizontal, the system maintains processing flexibility while reducing device height and enabling compact stacking of multiple apparatuses
3Area of stationary object
If processors are arranged in compact configuration, then space utilization is improved, but liquid leakage risk increases
Solution Approach 1:
The patent introduces a cup structure as an intermediary containment element that surrounds the stage and substrate. This cup acts as a barrier that confines processing liquids within a defined boundary, preventing liquid leakage even when processors are arranged in compact configurations. The cup structure mediates between the compact arrangement requirement and the liquid containment requirement
Data Source
AI summary
A liquid processing apparatus provided with a plurality of processors, wherein each of the processors includes a stage on which a substrate is placed, a cup surrounding the stage and the substrate placed thereon, a first processing nozzle and a second processing nozzle configured to supply a first and second processing liquid to the substrate, respectively, a first standby portion where the first processing nozzle stands by, a second standby portion where the second processing nozzle stands by, a first mover configured to move the first processing nozzle between the first standby portion and a first processing position, a second mover configured to move the second processing nozzle between the second standby portion and a second processing position, and a guide shared by the first mover and the second mover such that each of the first mover and the second mover moves in the left-right direction.