Wafer Transport Container Pin-Lock Closure for Clean Sealing
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Solution Overview
Problem
In semiconductor fabrication, there is a need for containers that maintain a clean room climate to store and transport semiconductor wafers without contaminating substances, as larger wafers with smaller devices require advanced materials and secure packaging to prevent damage and contamination.
Innovation Solution
A container apparatus comprising two body portions with a pivotal pin structure and pin holder system, allowing for airtight sealing and secure closure, along with a storage medium for wireless communication like RFID for tracking, and made from materials providing anti-static properties and chemical resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional containers are used for storing and transporting semiconductor wafers, then the containers are simple in structure and easy to manufacture, but they cannot effectively prevent contamination and damage to the semiconductor elements
Solution Approach 1:
The container is divided into a lid portion and a base portion that can be separately assembled and disassembled. The lid portion includes a first body with front and rear side walls, while the base portion includes a second body with corresponding walls. This segmentation allows for precise sealing interfaces and easier manufacturing while maintaining protection reliability.
Solution Approach 2:
The pivotal pin structure is nested within the rear side wall of the lid portion, with the pin holder integrated into the wall structure. The pin can rotate within the pin holder to transition between locked and unlocked positions. This nested design consolidates multiple functions (sealing, locking, unlocking) into a compact integrated structure, reducing overall complexity while ensuring reliable protection.
2Reliability
If the container uses a secure closure system with pivotal pin structure, then the sealing and protection are improved, but the operation complexity increases
Solution Approach 1:
The pin is designed to rotate dynamically within the pin holder, transitioning between a first position (locked state) and a second position (unlocked state). This dynamic mechanism allows the container to maintain secure sealing during transport while enabling easy opening when needed. The rotational movement provides a simple yet effective way to control the sealing integrity without complex operational procedures.
3Volume of moving object
If larger wafer sizes are used to accommodate scaling requirements, then the device capacity is improved, but the risk of contamination and damage increases
Solution Approach 1:
The container design provides enhanced protection specifically at critical locations where contamination and damage risks are highest. The pivotal pin structure creates a secure sealed environment at the closure interface, while the interlocking walls provide localized protection against impact and contamination. This targeted approach to protection allows larger wafers to be safely transported without requiring complete redesign of the entire container system.
Data Source
AI summary
An apparatus includes a first portion and a second portion. The first portion includes a first front side wall, a first rear side wall, a top wall, and at least one pivotal pin structure extending from the first rear side wall. The at least one pivotal pin structure comprises a base, a shaft, and a head having a non-circular cross-sectional shape. The second portion includes a second front side wall, a second rear side wall, a bottom wall, and at least one pin holder extending from the second rear side wall. The at least one pin holder defines an opening for accepting the head of the at least one pivotal pin structure at an alignment. The head of the at least one pivotal pin structure extends through the opening. The first portion and the second portion are pivotally movable between an open configuration and a closed container configuration.