Wafer Pod Size Adaptation With Baseplate and Biasing Cassette Restraint
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Solution Overview
Problem
Wafer cassettes in wafer containers can move relative to the pod during handling, leading to potential damage or particle generation, and existing containers are often configured for a specific size, making them incompatible with smaller cassettes.
Innovation Solution
A baseplate and biasing members are used to secure a smaller wafer cassette within a larger pod by compressing between the cassette and the pod's closed end, limiting movement through transverse coupling with the door and vertical compression, using elastic bends to apply downward force.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a pod is configured for a specific size of wafer cassette, then the cassette is securely held, but the pod cannot accommodate smaller cassettes
Solution Approach 1:
The pod transitions from a static configuration to a dynamic one by introducing a movable door that can be positioned in different locations along the pod length. This allows the same pod to securely hold cassettes of different sizes by adjusting the door position to create appropriate confinement space, resolving the contradiction between adaptability and reliability
Solution Approach 2:
The pod is segmented into functional zones by the movable door, which divides the internal space to create a secure containment area for the cassette. This segmentation allows the pod to adapt to different cassette sizes while maintaining secure holding through the creation of appropriate confined spaces
2Adaptability or versatility
If the pod is designed to securely hold a larger cassette, then movement is prevented, but smaller cassettes cannot be accommodated
Solution Approach 1:
The pod is designed with multi-functionality through the movable door mechanism, allowing a single pod structure to serve multiple purposes by accommodating different cassette sizes. The door can be repositioned to create appropriate confinement for various cassette dimensions, eliminating the need for multiple specialized pods and reducing overall system complexity
3Adaptability or versatility
If the door is moved to accommodate smaller cassettes, then size adaptability is achieved, but the securing mechanism may become less effective
Solution Approach 1:
The door's ability to move dynamically allows it to be repositioned according to cassette size while maintaining effective confinement. The door creates a movable wall that adapts to different cassette dimensions, ensuring reliable securing through appropriate spatial confinement regardless of the specific cassette size being held
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution securely holds smaller wafer cassettes within the pod, preventing movement and potential damage, while adapting the container to accommodate different sizes, ensuring safe transport and storage.
Implementation Method 1
the biasing member includes a first end, a second end opposite the first end, a first elastic bend, and a second elastic bend
Implementation Method 2
the biasing member is compressed between the top wall of the wafer cassette and the closed end of the pod and pushes the wafer cassette and the baseplate against the door
Data Source
AI summary
A wafer container includes a pod, a door, a wafer cassette with a top wall, a baseplate, and a biasing member. The pod includes side wall(s), a closed end, and an open end. When closed by the door, the baseplate is located between the door and the wafer cassette and the biasing member is compressed between the wafer cassette and the closed end of the pod. A size adaption system for securing a wafer cassette within an internal space of a closed pod includes a baseplate and a biasing member. The baseplate includes at least one of a projection for coupling the baseplate and the wafer cassette and a notch for coupling the baseplate and the door. The biasing member to be disposed in compression between the wafer cassette and a closed end of the pod.