Wafer Cleaning Pressure Sensor Plate Segmentation
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Solution Overview
Problem
In semiconductor processes, there is a need for a pressure measuring apparatus that can precisely measure the discharge pressure of liquids from nozzles to ensure effective cleaning of wafers without damaging semiconductor elements, while also being resistant to short-circuiting from the liquid discharge.
Innovation Solution
A pressure measuring apparatus with a plate design featuring a pressure sensor on one surface and electrical components, including a controller and power supply, on the opposite surface, which includes a sensor board with multiple sensors to detect discharge pressure and position, and a communicator to transmit data externally, with a casing to protect the components from liquid exposure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the pressure sensor is made large to improve measurement precision, then the measurement precision is improved, but the device becomes more likely to be short-circuited by liquid discharge
Solution Approach 1:
The device is divided into two separate surfaces: the first surface (facing the nozzle) hosts only the pressure sensor for accurate measurement, while the second surface (opposite side) hosts all electrical components. This segmentation isolates the sensor from liquid exposure while maintaining measurement precision.
Solution Approach 2:
The electrical components are moved from the front surface to the back surface of the plate, utilizing the third dimension (depth/thickness) to resolve the conflict between sensor size and component protection.
2Device complexity
If all components are placed on one surface to reduce device complexity, then the device complexity is reduced, but the electrical components become vulnerable to liquid discharge and short-circuiting
Solution Approach 1:
Components are segmented by function and placed on different surfaces: pressure sensing components on the first surface facing the nozzle, and electrical control components on the second surface away from the nozzle, protecting them from liquid exposure.
Solution Approach 2:
Electrical components are extracted from the liquid-exposed environment and placed on the opposite surface of the plate, separating them from the hazardous zone where liquid is discharged.
3Measurement precision
If the pressure sensor is positioned close to the nozzle to improve measurement accuracy, then the measurement accuracy is improved, but the risk of liquid discharge causing short-circuiting increases
Solution Approach 1:
The device separates sensing functions from electrical control functions across two surfaces, allowing the sensor to be positioned optimally for measurement while electrical components remain protected from liquid exposure.
Solution Approach 2:
The plate structure acts as an intermediary, with the pressure sensor detecting liquid parameters on the first surface while the solid plate material protects the electrical components on the second surface from direct liquid contact.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus accurately measures discharge pressure and position, reducing the risk of short-circuiting and ensuring precise control of liquid pressure, thereby enhancing semiconductor processing quality and preventing damage to wafer elements.
Implementation Method 1
a pressure sensor configured to detect a discharge position and the discharge pressure at the discharge position of the liquid and generate a signal based on the discharge pressure
Data Source
AI summary
A pressure measuring apparatus for measuring a jetting pressure of a liquid jetted from a nozzle includes a plate including: a first surface facing the nozzle; and a second surface opposite to the first surface; a pressure sensor configured to detect a discharge position and the discharge pressure at the discharge position of the liquid and generate a signal based on the discharge pressure; and electrical components including a controller configured to receive the signal and collect data regarding the discharge pressure. The pressure sensor is provided on the first surface of the plate and the electrical components are provided on the second surface of the plate.