Wafer Probe Apparatus with Circumferential Track

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Solution Overview

Problem

Current wafer probers are time-consuming in inspecting multiple sites on the entire surface of a wafer due to limited directional movement, which restricts the flexibility and efficiency of the inspection process.

Innovation Solution

A probe apparatus with a chuck and a surrounding track that allows the tester with a probe to move circumferentially around the wafer, supported by a processing unit that controls the movement, enabling the probe to access more directions and inspect the entire surface quickly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the current wafer prober moves the probe and wafer along x-axis, y-axis, and z-axis, then the probe can inspect multiple inspection sites, but the inspection process becomes time-consuming

Engineering Contradiction:

Improveinspection direction flexibilityVSAvoidinspection time

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

The patent introduces a circumferential movement dimension by placing the tester on a track that allows it to rotate around the wafer. This adds a new degree of freedom to the inspection system, enabling the probe to access inspection sites from multiple angular directions simultaneously, thereby reducing the time required to inspect the entire wafer surface.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent makes the tester movable along the track in a dynamic manner, allowing it to move from one inspection site to another through circumferential movement. This dynamic positioning capability enables the system to adapt to different inspection locations quickly without manual intervention, improving both flexibility and inspection speed.

Inventive Principle:

Principle #15Dynamics

2Productivity

If the probe moves along multiple directions to inspect the entire wafer surface, then the inspection comprehensiveness improves, but the device complexity increases

Engineering Contradiction:

Improveinspection speedVSAvoidmovement control complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The patent replaces manual or complex mechanical movement control with an automated tester that moves along a predefined track. This substitution simplifies the control mechanism while enabling multi-directional inspection, as the tester's movement is governed by the track geometry rather than complex positioning systems.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If the tester moves circumferentially around the wafer, then the probe can access more directions, but the track structure adds device complexity

Engineering Contradiction:

Improveprobe movement flexibilityVSAvoidtrack structure complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The track structure serves multiple functions: it guides the tester's circumferential movement, provides mechanical support, and defines the inspection path. By making the track multi-functional, the patent reduces the need for additional separate components, thereby limiting the increase in device complexity while achieving flexible probe movement.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS20230288473A1Probe apparatus with a track

Publication Date: 2023.09.14 NAN YA TECH

AI summary

A probe apparatus includes a chuck configured to support a wafer, a track surrounding the chuck, a tester disposed on the track and having a probe. The tester is configured to move around the wafer along a circumferential direction. The probe apparatus also includes a processing unit in communication with the tester and configured to control a movement of the tester.