Adjustable Wafer Processing with Flow-Guided Impact Control
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Solution Overview
Problem
Existing development equipment has poor applicability and high cost, leading to potential damage of workpieces due to inconsistent impact forces from fluid and limited adaptability to different workpiece sizes.
Innovation Solution
An integrated processing equipment with an inclination-angle adjusting unit and flow-guide device that adjusts the inclination angle and distance of the workpiece relative to the fluid flow, allowing for adaptable processing of various sizes and reducing impact forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If fluid is sprayed onto the wafer at high speed to improve development efficiency, then productivity increases, but the impact force damages the workpiece surface
Solution Approach 1:
The patent makes the flow-guide part movable relative to the workpiece, allowing dynamic adjustment of the distance between the liquid outlet and workpiece surface. This enables optimization of fluid impact force - reducing it to prevent surface damage while maintaining sufficient flow for effective development, thus resolving the contradiction between productivity and surface protection
Solution Approach 2:
The patent changes the physical parameter of distance between the flow-guide part and workpiece by making the flow-guide part movable. By adjusting this distance parameter, the fluid impact force can be controlled to an optimal level that ensures both high development efficiency and minimal surface damage
2Manufacturing precision
If specialized equipment is designed for different workpiece sizes to improve processing precision, then manufacturing precision increases, but device complexity and cost increase
Solution Approach 1:
The patent makes the processing equipment universal by enabling adjustment of the inclination angle and position of the workpiece through the movable flow-guide part and inclination-angle adjusting unit. This single equipment can now process workpieces of different sizes and orientations, eliminating the need for multiple specialized devices while maintaining feature size control precision
Solution Approach 2:
The patent introduces dynamic adjustability through the movable flow-guide part and inclination-angle adjusting unit, allowing the equipment to adapt to different workpiece sizes and orientations. This dynamic configuration enables one piece of equipment to perform multiple functions, reducing overall device complexity while maintaining manufacturing precision
3Ease of operation
If the workpiece is held at a fixed angle to simplify operation, then ease of operation improves, but adaptability to different workpiece sizes decreases
Solution Approach 1:
The patent transforms the fixed-angle holding mechanism into a dynamic system with movable flow-guide part and inclination-angle adjusting unit. This allows the equipment to adapt to different workpiece sizes and orientations while maintaining ease of operation through automated or simplified adjustment procedures
Solution Approach 2:
The inclination-angle adjusting unit pre-adjusts the workpiece angle and flow-guide position before processing begins. This preliminary action ensures the equipment is properly configured for the specific workpiece size and type, making subsequent operation simple while maintaining high adaptability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures high development quality and wide application range by minimizing surface damage and reducing the need for specialized equipment for different workpiece sizes, thereby lowering costs.
Implementation Method 1
the liquid storage part is configured to transport liquid to the flow-guide part
Implementation Method 2
the liquid can flow to the workpiece positioned on the rotating unit through the flow-guide part
Implementation Method 3
the rotating unit is configured to carry the workpiece and can drive the workpiece to rotate around the first axis
Implementation Method 4
the inclination-angle adjusting unit is configured to drive the rotating unit to rotate around the second axis at an angle with the first axis
Data Source
AI summary
Provided are integrated processing equipment, including base, rotating device, and flow-guide device. The rotating device includes inclination-angle adjusting unit and rotating unit. The inclination-angle adjusting unit is arranged on the base, the rotating unit is connected with the inclination-angle adjusting unit, the rotating unit is used to carry the workpiece and can drive the workpiece to rotate around first axis, and the inclination-angle adjusting unit is used to drive the rotating unit to rotate around second axis at angle to the first axis. The flow-guide device includes frame body, liquid storage part and flow-guide part. The frame body is connected to the inclination-angle adjusting unit, both the liquid storage part and the flow-guide part are connected to the frame body, and the liquid storage part is used to transport the liquid to the flow-guide part, through which the liquid can flow to the workpiece positioned on the rotating unit.