Wafer Repair Mining Rule Library for Fail Bit Detection
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Solution Overview
Problem
In circuit probe tests, relying on artificial experiences to determine predicted fail bit locations often results in the omission of some fail bit locations, leading to a higher probability of wafer failure due to incomplete repair.
Innovation Solution
A method and apparatus that utilize a mining rule library to determine target potential fail bits associated with identified fail bits, allowing for more comprehensive identification and repair of fail locations, thereby reducing the likelihood of wafer failure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If artificial experiences are used to determine predicted fail bit locations, then the repair process can be simplified and executed quickly, but some fail bit locations are omitted leading to higher wafer failure probability
Solution Approach 1:
The patent segments the fail bit location determination process into multiple independent mining rules (spatial distribution rule, cluster distribution rule, edge distribution rule, etc.). Each rule independently identifies potential fail bits based on different patterns, and their results are combined to comprehensively cover all fail locations without omission.
Solution Approach 2:
The patent implements feedback by using actual fail bit locations discovered during testing to continuously optimize and update the mining rules in the mining rule library. This feedback mechanism ensures the rules become increasingly accurate and reliable over time, reducing wafer failure probability while maintaining efficient repair execution.
2Reliability
If comprehensive mining rules are applied to identify all potential fail bits, then wafer failure probability is reduced, but the complexity of the repair system increases
Solution Approach 1:
The patent performs preliminary action by pre-establishing a mining rule library containing multiple mining rules before the repair process begins. These rules are prepared in advance based on historical data and expert knowledge, allowing the system to quickly identify fail bits during execution without complex real-time analysis, thus reducing system complexity while maintaining high reliability.
Solution Approach 2:
The mining rule library is designed to be self-updating and self-optimizing. The system automatically uses test results to refine the mining rules without requiring manual intervention or complex external configuration, reducing operational complexity while improving reliability through continuous learning.
3Measurement precision
If multiple mining rules are used to identify potential fail bits, then more fail locations are detected, but the time required for analysis increases
Solution Approach 1:
The patent applies partial action by selectively executing only the most relevant mining rules based on the specific test context and observed fail patterns. Rather than always running all possible mining rules, the system intelligently activates only those needed for the current situation, maintaining high detection accuracy while minimizing analysis time.
Data Source
AI summary
Embodiments provide a method and an apparatus for repairing a fail location. When repairing a fail location of a wafer, a fail bit in a wafer to be processed may be first determined, and a target potential fail bit associated with the fail bit may be determined based on a potential mining rule included in a mining rule library.