Wafer Retainer Rotation for Non-Contact Abnormality Detection
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Solution Overview
Problem
Semiconductor substrates experience cracking and warping due to thermal stress during processing, leading to potential accidents and damage to processing apparatus components when abnormal substrates are transferred.
Innovation Solution
A method involving a wafer abnormality detection device with detection arms that rotate the substrate retainer to a specific angle for non-contact detection of substrate abnormalities, allowing for identification of cracks and jumps without collision, enabling safe transfer and processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a photo sensor is moved along the vertical axis to detect substrate abnormalities, then substrate detection capability is improved, but the risk of collision with abnormal substrates increases
Solution Approach 1:
The detection arm is extended horizontally beyond the substrate retainer's vertical axis, moving the photo sensor into a lateral detection position. This dimensional shift allows the sensor to detect substrate abnormalities (cracks, warping, missing substrates) from the side without requiring vertical movement that would bring it into collision path with abnormal substrates during transfer operations.
2Ease of operation
If a substrate holder is used to transfer abnormal substrates, then substrate transfer capability is improved, but the risk of collision with detection mechanisms increases
Solution Approach 1:
The substrate holder operates in the vertical dimension to pick up and transfer substrates, while the photo sensor is positioned in the horizontal dimension beyond the retainer's vertical axis. This spatial separation in different dimensions allows both the substrate holder to transfer abnormal substrates and the sensor to detect them without collision.
3Productivity
If the substrate retainer is not rotated, then transfer efficiency is improved, but detection capability is reduced
Solution Approach 1:
The photo sensor is positioned horizontally beyond the vertical axis of the substrate retainer, creating a detection zone that encompasses all substrate positions during rotation. This lateral positioning allows the sensor to detect substrate abnormalities throughout the entire rotation cycle without requiring the retainer to stop or slow down, maintaining transfer efficiency while enabling continuous detection.
Data Source
AI summary
Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.