Inter-Site Wafer Lot Routing Using Statistical Backup Paths
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Solution Overview
Problem
Current manufacturing execution systems (MES) in semiconductor fabrication facilities do not provide efficient backup routing between different semiconductor fab sites, leading to inefficiencies in wafer processing and increased complexity due to factors like manufacturing constraints, weather, and traffic.
Innovation Solution
An MES apparatus and method that utilize an inter-site backup management system to select efficient auxiliary routes for semiconductor wafers between fab sites, considering site availability, transportation methods, and constraints, with the aid of a machine learning model for route optimization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If traditional MES systems are used for wafer routing, then basic manufacturing execution is maintained, but routing efficiency between fab sites is poor and cycle time is increased
Solution Approach 1:
The system performs preliminary actions by pre-establishing backup routing relationships between fab sites and pre-configuring auxiliary routes before disruptions occur. The inter-site backup management apparatus maintains a database of pre-defined routing options and site capabilities, enabling rapid route selection when disruptions occur without requiring real-time decision-making during critical wafer transfer operations.
Solution Approach 2:
The patent introduces an inter-site backup management apparatus as an intermediary system that mediates between the MES and the physical transportation infrastructure. This intermediary layer optimizes routing decisions by considering site availability, transportation constraints, and disruption scenarios, thereby improving wafer lot throughput and reducing cycle time through intelligent route selection.
2Productivity
If backup routing between fab sites is not optimized, then system simplicity is maintained, but tool utilization is reduced and processing efficiency decreases
Solution Approach 1:
The inter-site backup management apparatus provides universal functionality by serving multiple purposes: it manages primary routing, handles backup routing, monitors site availability, and optimizes transportation across different fab sites. This multi-functional system improves tool utilization without proportionally increasing complexity, as a single apparatus handles diverse routing management tasks.
Solution Approach 2:
The system optimizes routing by dynamically changing parameters such as site availability status, transportation method selection, and route configuration based on real-time conditions. The inter-site backup management apparatus adjusts these parameters to maximize tool utilization while maintaining manageable system complexity through automated parameter optimization.
3Productivity
If manual routing management is used, then system complexity is low, but routing efficiency is poor and throughput is reduced
Solution Approach 1:
The inter-site backup management apparatus implements feedback mechanisms by continuously monitoring site availability, wafer lot status, and routing performance. This feedback enables the system to automatically adjust routing decisions, select optimal auxiliary routes, and improve wafer processing efficiency through data-driven automation while maintaining reasonable system complexity.
Solution Approach 2:
The system enables self-service routing management where the inter-site backup management apparatus autonomously selects auxiliary routes, manages transportation coordination, and handles routing optimizations without requiring extensive manual intervention. This automated self-service approach improves processing efficiency while keeping automation complexity manageable through intelligent algorithms.
Data Source
AI summary
A method includes: receiving an auxiliary routing request from a manufacturing execution system (MES) apparatus of a first site by an inter-site backup management apparatus; selecting an auxiliary route to a second site based on the auxiliary routing request and a statistical model by the inter-site backup management apparatus; including the auxiliary route in a route associated with a wafer lot by the MES apparatus; and performing a semiconductor processing operation on a wafer of the wafer lot according to the route.