Wafer Script Setting With Production Info Verification
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Solution Overview
Problem
In the integrated circuit industry, existing methods for modifying wafer execution scripts are not real-time and often lead to errors, resulting in wafer lot scraping and inefficiencies, especially when dealing with large numbers of wafers, as they fail to verify production information and require frequent manual submissions.
Innovation Solution
A method and apparatus for setting wafer scripts that acquire and verify lot identification and production information based on execution necessary conditions, allowing for real-time adjustments and synchronization with the material execution unit, thereby preventing errors and improving production efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the setter manually modifies the execution script based on lot identification provided by the demand applicant, then the script can be adjusted according to business requirements, but the modification is not real-time and fails to verify production information, leading to errors and wafer lot scraping
Solution Approach 1:
The system performs preliminary verification of production information against execution necessary conditions before script execution. The platform unit automatically checks whether production information satisfies the execution necessary conditions associated with the script, preventing errors before they occur rather than requiring manual verification and modification after the fact.
Solution Approach 2:
The system implements automatic feedback mechanisms where the platform unit continuously monitors and verifies production information against execution necessary conditions. When conditions are not met, the system automatically identifies and corrects issues, providing real-time feedback that prevents wafer lot scraping and ensures script execution accuracy.
2Adaptability or versatility
If the demand applicant submits information to the setter for each modification demand, then the script can be adjusted according to specific requirements, but the process takes a long time especially when the number of wafers in the same lot is large
Solution Approach 1:
The platform unit performs self-service by automatically verifying production information against execution necessary conditions without requiring manual intervention from the demand applicant or setter. The system independently checks conditions, identifies issues, and executes scripts appropriately, eliminating the need for repeated information submission and manual script modification while maintaining adaptability to different production scenarios.
Solution Approach 2:
The system performs preliminary verification of execution necessary conditions before script execution is attempted. By pre-checking whether production information satisfies required conditions, the system avoids unnecessary manual review processes and enables automated script execution, significantly improving productivity while maintaining the ability to handle diverse script requirements.
3Ease of manufacture
If the execution script is modified based only on lot identification without verifying production information, then the modification process is simple, but it fails to detect errors and causes wafer lot scraping
Solution Approach 1:
The platform unit implements automatic feedback verification by checking whether production information satisfies execution necessary conditions associated with the script. This automated verification process maintains the simplicity of script modification while ensuring reliability, as the system automatically detects and prevents errors that would otherwise cause wafer lot scraping.
Solution Approach 2:
The system replaces manual verification processes with automated computational verification. Instead of requiring manual review of production information against script requirements, the platform unit automatically checks conditions using computational logic, maintaining ease of manufacture through automated processes while ensuring high reliability in error detection.
Data Source
AI summary
The present disclosure provides a method and an apparatus for setting wafer script, a device, and a storage medium. In response to the demand unit determining that the execution necessary condition of the script to be executed satisfies the business requirement based on the parameter information, the platform unit acquires the lot identification of the script to be executed and the corresponding production information. In response to the demand unit determining that the script to be executed is executed for the wafers corresponding to the script to be executed for the first time, the platform unit detects whether the first production information corresponding to the first wafers satisfies the execution necessary condition. If satisfied, the platform unit sets parameter information and assignment information for the first wafers, and synchronizes the first wafers with the set information to the material execution unit such that the material execution unit performs corresponding operation.