Wafer Sheet Trimming and Scrap Removal Around the Outer Edge
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Solution Overview
Problem
Existing sheet attaching apparatuses require a mechanism to remove unnecessary sheet parts attached to wafers, which is inefficient when the sheet is wound around a roll and then hollowed out.
Innovation Solution
A sheet attaching apparatus with a chuck table, sheet holding section, cutting section, and sheet accommodating section that cuts and removes the unnecessary sheet parts along the periphery of the wafer, using a rotating roller to press the cut sheet into an accommodating section.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a sheet having an area larger than the workpiece is attached to the workpiece, then the sheet can fully cover the workpiece for protection, but the protruding sheet becomes unnecessary waste that requires removal
Solution Approach 1:
The sheet is segmented into two parts: the necessary portion that covers the workpiece and the excess portion that protrudes. The cutting section separates these segments by cutting along the periphery of the workpiece, allowing the excess sheet to be removed while retaining the protective coverage function.
Solution Approach 2:
The unnecessary excess sheet is extracted from the assembled structure by cutting it away from the workpiece. The sheet holding section then extracts this cut excess sheet from the processing area and places it in the accommodating section, completing the removal of waste material.
2Productivity
If the sheet is attached in a state of being wound around a roll and then hollowed out, then the sheet can be efficiently applied, but a mechanism for removing the hollowed unnecessary sheet is required
Solution Approach 1:
The sheet holding section uses the sheet's own protruding portion as the holding target. By holding the excess sheet that naturally extends beyond the workpiece periphery, the system eliminates the need for complex removal mechanisms, as the sheet structure itself facilitates the holding and removal process.
Solution Approach 2:
The sheet holding section extracts the excess sheet from the processing area by holding its protruding portion. This extracted sheet is then moved to the accommodating section, providing a simple removal mechanism that complements the efficient sheet attachment process.
3Ease of operation
If a mechanism for removing the hollowed unnecessary sheet is added, then the unnecessary sheet can be removed, but the device complexity increases
Solution Approach 1:
The sheet holding section merges the functions of holding, cutting coordination, and excess sheet removal into a single integrated component. By combining these functions and utilizing the naturally protruding excess sheet as the holding target, the system achieves easy sheet removal without adding complex separate removal mechanisms.
Data Source
AI summary
A sheet attaching apparatus includes a sheet attaching section that attaches a sheet to a workpiece, and a sheet cutting section that cuts off the sheet from the workpiece along an outer edge. The sheet cutting section includes a chuck table that holds the workpiece, a sheet holding section that detachably holds a peripheral portion of the sheet, a cutting section that cuts the sheet along the outer edge of the workpiece, and a sheet accommodating section that accommodates an unnecessary part of the sheet cut and dropped due to release of holding by the sheet holding section.