Wafer Stage Shaft Layout With Nested Lifter for Compact Mounting
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Solution Overview
Problem
Existing wafer stage apparatuses are large and occupy significant space, which is inefficient for compact wafer processing environments.
Innovation Solution
A wafer stage apparatus is designed with a rotating platform assembly, a hydromagnetic shaft, and a lifting assembly. The hydromagnetic shaft features a bucket-shaped inner shaft with an accommodating space for the lifting assembly, optimizing internal space utilization and enhancing compactness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the lifting assembly is placed outside the inner shaft, then the structure is simpler and easier to manufacture, but the apparatus occupies more space and has lower compactness
Solution Approach 1:
The lifting assembly is nested inside the bucket-shaped inner shaft, with the main body positioned within the accommodating space formed by the inner shaft's cavity. This nesting arrangement allows the lifting assembly to be housed within the existing structural envelope of the shaft, significantly reducing the overall occupied space while maintaining functional separation and structural integrity.
Solution Approach 2:
The inner shaft is designed with a bucket-shaped configuration that creates an internal accommodating space, effectively utilizing the radial and axial dimensions of the shaft structure. By placing the lifting assembly within this three-dimensional space, the design transforms the shaft from a simple support element into a multi-functional component that provides both structural support and housing for the lifting mechanism.
2Stability of the object's composition
If the inner shaft is made bucket-shaped with accommodating space, then the structural compactness is improved, but the manufacturing complexity increases
Solution Approach 1:
The inner shaft is segmented into distinct functional zones: the bucket-shaped accommodating space for housing the lifting assembly, the magnetic fluid sealing interface with the outer shaft, and the support connection to the rotating platform. This segmentation allows each zone to be optimized independently for its specific function while maintaining overall structural coherence and manufacturability.
Solution Approach 2:
The shaft assembly utilizes composite construction principles by combining the bucket-shaped inner shaft structure with magnetic fluid sealing between the inner and outer shafts. This composite approach allows the structural component (inner shaft) to be optimized for compactness while the sealing system provides the necessary hermetic barrier, distributing manufacturing complexity across different material and functional systems.
3Reliability
If the lifting assembly is hermetically assembled inside the inner shaft, then the vacuum sealing is improved, but the assembly complexity increases
Solution Approach 1:
The magnetic fluid serves as an intermediary sealing medium between the inner shaft and outer shaft, creating a hermetic barrier without requiring complex mechanical seals or gaskets. This fluid sealant fills the gap between the rotating inner shaft and stationary outer shaft, maintaining vacuum integrity while allowing relative motion, thereby simplifying the assembly process compared to traditional mechanical sealing arrangements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the occupied space of the wafer stage apparatus, improves structural compactness, and facilitates easier mounting, while maintaining the necessary functionality for wafer processing.
Implementation Method 1
a magnetic fluid is provided between the inner shaft and the outer shaft
Data Source
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AI summary
A wafer stage apparatus, comprising: a rotating platform assembly, comprising a supporting platform and a crimping part, the supporting platform being used for supporting a wafer, and the crimping part being used for pressing the wafer; a magnetic fluid shaft, comprising an inner shaft and an outer shaft, a magnetic fluid being arranged between the inner shaft and the outer shaft, the inner shaft comprising an end part member and a cylindrical member, and the end part member and the cylindrical member enclosing to form an accommodating space; and a lifting assembly, comprising a main body portion and a lifting body, the main body portion being located in the accommodating space, the lifting body being slidably and hermetically assembled on the end part member, and the lifting body interacting with the crimping part. The described wafer stage apparatus can more fully utilize the internal space of the inner shaft, so as to improve the structural compactness and the level of integration of the equipment, and the space occupied by the wafer stage apparatus can be effectively reduced, facilitating mounting.