Wafer Storage Container Blocking Member for Contaminant Control
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Solution Overview
Problem
Existing wafer storage containers face issues with contaminant trapping and inefficient humidity control due to blocked exhaust valves, leading to contamination and oxidation of wafers, as well as unintended inert gas supply when blocking the gas supply valve.
Innovation Solution
A wafer storage container with a blocking member that can quickly block or partially block injection and exhaust holes, using a communication hole and actuating portion to control the flow of purge gas independently of the supply or discharge valve positions, and a sensor-based control system to manage internal atmosphere.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the air discharge valve is closed to block exhaust flow, then the exhaust of contaminants is prevented, but the contaminants trapped in the air discharge line flow into the storage chamber through the injection hole
Solution Approach 1:
The system divides the gas flow control into separate independent paths: the air discharge line with its own blocking member and the injection hole with its own blocking member. This segmentation allows the injection hole to be blocked independently to prevent contaminant ingress, while the air discharge line can be managed separately to exhaust contaminants without causing backflow into the storage chamber.
Solution Approach 2:
The injection hole blocking member acts as an intermediary barrier that can be activated to seal off the injection hole when contaminants are detected in the air discharge line. This intermediary blocking mechanism prevents the direct path of contaminant flow from the air discharge line into the storage chamber, solving the problem of contaminant backflow when the air discharge valve is closed.
2Ease of operation
If the gas supply valve is closed to stop inert gas supply, then gas flow is controlled, but contaminants remain trapped in the gas supply line and may flow into the storage chamber
Solution Approach 1:
The system segments the gas control functions into separate blocking members: one for the gas supply line and another for the injection hole. This allows the injection hole blocking member to prevent contaminant entry into the storage chamber even when the gas supply valve is closed and contaminants remain in the supply line.
Solution Approach 2:
The injection hole blocking member provides preliminary protection by blocking the injection hole before contaminants can flow from the gas supply line into the storage chamber. This preliminary anti-action prevents the harmful effect of contaminant ingress even when the gas supply valve closure is insufficient to prevent contaminant movement.
3Productivity
If valves are used to control purge gas flow, then gas flow regulation is achieved, but quick blocking is difficult and unintended gas supply occurs
Solution Approach 1:
Instead of using valves that open to allow flow and close to block flow, the system uses blocking members that are closed by default and open only when needed. This inverted approach allows quick blocking by simply closing the blocking member, providing both speed and precision in gas flow control without the lag associated with valve operation.
Solution Approach 2:
The blocking function is extracted from the valve mechanism and implemented as separate blocking members positioned directly at the injection hole and air discharge line. This extraction allows independent, rapid blocking of gas flow paths without relying on valve timing and positioning, achieving both quick response and precise control.
Data Source
AI summary
The present invention relates to a wafer storage container capable of removing fumes on a wafer or removing moisture therefrom by supplying purge gas to the wafer stored in a storage chamber. More particularly, the present invention relates to a wafer storage container capable of quickly blocking an injection hole and an exhaust hole and of preventing contaminants from flowing into a storage chamber upon the blocking of the exhaust hole.