Wafer Storage System Vertical Rail Layout
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Solution Overview
Problem
The increasing size of semiconductor manufacturing factories requires more storage space for wafers, and existing storage systems often interfere with operator movement and restrict installation space due to the need for side track buffers to be adjacent to overhead hoist transport systems.
Innovation Solution
A wafer storage system is designed with a main rail, overhead hoist transport, an interface port, an auxiliary rail, an auxiliary transfer unit, a storage shelf, and a worktable, utilizing ceiling space to increase storage capacity while allowing continuous maintenance and repair access, with the auxiliary transfer unit moving storage cases between the interface port and shelves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the size of semiconductor manufacturing factories is increased to meet production demands, then production capacity is improved, but storage space requirements increase and operator movement is restricted
Solution Approach 1:
The patent transitions from horizontal floor-based storage to vertical ceiling-based storage by installing rails and transport systems above the production floor. This dimensional change allows storage facilities to be positioned in the vertical space above equipment rather than occupying horizontal floor space, thereby increasing storage capacity without restricting operator movement on the production floor.
2Productivity
If side track buffers are positioned adjacent to overhead hoist transport for efficient wafer transfer, then transfer efficiency is improved, but installation space is restricted
Solution Approach 1:
The patent positions side track buffers and storage shelves in the vertical dimension above the production floor rather than adjacent to the overhead hoist transport on the same horizontal level. This allows multiple buffer positions and storage locations to be arranged vertically along the rail system, increasing installation flexibility and space utilization without compromising transfer efficiency.
Solution Approach 2:
The patent divides the storage system into modular components including multiple storage shelves, auxiliary transfer units, and interface ports that can be independently configured along the vertical rail system. This segmentation allows flexible arrangement of buffers and storage locations at different vertical positions, optimizing both transfer efficiency and space utilization.
3Quantity of substance
If storage shelves are positioned to maximize wafer storage capacity, then storage capacity is improved, but operator access for maintenance becomes difficult
Solution Approach 1:
The patent introduces auxiliary transfer units as intermediary devices that operate on auxiliary rails parallel to the main overhead rail system. These auxiliary transfer units can horizontally move storage cases between the main vertical transport path and storage shelves, providing operator access points at various heights without requiring operators to directly access high位置的 storage shelves, thus maintaining both storage capacity and maintenance accessibility.
Data Source
AI summary
A wafer storage system includes a main rail, an overhead hoist transport (OHT) on the main rail, the OHT being configured to transfer at least one storage case with wafers, an interface port on at least one side of the main rail, an auxiliary rail on one side of the interface port, the auxiliary rail being parallel to the main rail, and the interface port being between the main rail and the auxiliary rail, an auxiliary transport on the auxiliary rail, the auxiliary transport being configured to move along the auxiliary rail and to move the at least one storage case, a storage shelf on at least one side of the auxiliary transport, the storage shelf being configured to store the at least one storage case, and a worktable on one side of the storage shelf, the storage shelf being between the worktable and the auxiliary transport.