Wafer Supply Apparatus with Buffer and Sorter
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Solution Overview
Problem
Existing systems face inefficiencies in supplying semiconductor wafers to processing tools, particularly in ensuring the right number and order of wafers are delivered, and in adapting the wafer combination to match subsequent processing tools.
Innovation Solution
An apparatus comprising a container storage rack, article storage rack, transfer means, transportation means, and supply means that allows for the sorting and random placement of wafers between storage racks and processing tools, enabling flexible and priority-based wafer delivery and combination adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If wafers are transported in a fixed-order pod system, then transportation is simple, but the processing efficiency decreases when wafer arrival order differs from processing priority
Solution Approach 1:
The system segments the wafer supply process into distinct functional modules: pod storage rack for container management, wafer buffer for intermediate storage, and sorter for reordering. This segmentation allows each module to handle specific tasks independently, enabling complex reordering operations without overwhelming the entire system.
Solution Approach 2:
The wafer buffer acts as an intermediary between the pod storage rack and the processing tool. It temporarily holds wafers and allows the sorter to rearrange them according to processing priority rather than arrival order, thus decoupling the transportation sequence from the processing sequence.
2Adaptability or versatility
If the number of wafers in pod matches processing tool requirements, then supply is efficient, but flexibility to handle varying pod sizes is lost
Solution Approach 1:
The system performs preliminary actions by pre-storing multiple pods in the pod storage rack and pre-positioning wafers in the wafer buffer according to processing priorities. This allows the processing tool to receive wafers immediately when needed, without waiting for pod arrival or reordering operations during critical processing periods.
Solution Approach 2:
The sorter provides local quality by selectively picking and placing individual wafers based on their specific processing requirements. Different wafers can be directed to different destinations or processed at different times, allowing the system to handle varying pod sizes and compositions while maintaining optimal processing efficiency.
3Ease of operation
If wafers are supplied in arrival order, then system operation is simple, but processing priority requirements cannot be met
Solution Approach 1:
The sorter enables self-service by automatically identifying and selecting wafers based on processing priority criteria without requiring external intervention. The system autonomously reorders wafers in the buffer according to processing requirements, maintaining operational simplicity while achieving priority-based processing.
4Adaptability or versatility
If pod composition is fixed, then transportation is straightforward, but adaptation to different processing tools is limited
Solution Approach 1:
The system introduces dynamics by allowing pod composition to be dynamically adjusted at the wafer level. The sorter can pick and place individual wafers to create customized pod compositions that match the specific requirements of different processing tools, transforming a static pod system into a dynamic, adaptable one.
Data Source
AI summary
An article supply apparatus includes a container storage rack for storing containers, and an article storage rack for storing articles taken out of the container. The article supply apparatus includes a transfer apparatus for transporting the articles between the container of the container storage rack and the article storage rack. The article supply apparatus includes a transportation apparatus for transporting the container between the transfer apparatus and the container storage rack, and a supply apparatus for taking required articles out of the article storage rack, and supplying the articles to a processing tool and supply the articles from the processing tool to the article storage rack.