Wafer Swapper Using Dual-Blade Concurrent Transfer

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Solution Overview

Problem

Conventional substrate transfer systems in semiconductor processing have limitations such as large footprint, reduced throughput, and particle generation, particularly in cluster and linear arrangements, which hinder efficient substrate handling between process chambers.

Innovation Solution

A substrate transfer system employing at least two blades for concurrent transfer between processing chambers, utilizing a transfer chamber system with slide assemblies, stepper motors, and servo motors to enable simultaneous movement of substrates without the need for intermediate via, reducing the footprint and maintaining a vacuum environment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a conventional cluster arrangement with a rotating robot is used for substrate transfer, then substrates can be transferred between process chambers, but the footprint of the central region becomes large and throughput is limited to one or two substrates at a time

Engineering Contradiction:

Improvesubstrate throughputVSAvoidfootprint of central region

Core Design Contradiction:

ProductivityVSArea of stationary object

Solution Approach 1:

The substrate transfer system is segmented into multiple independent linear conveyors operating in parallel, each capable of transferring substrates independently. This segmentation allows multiple substrates to be transferred simultaneously, increasing throughput while each conveyor maintains a compact footprint.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system transitions from a single central rotating robot operating in two dimensions to multiple linear conveyors operating in one dimension but arranged in parallel. This dimensional reorganization allows concurrent substrate transfer without requiring large central space for robot rotation.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Area of stationary object

If a linear arrangement with a single conveyor is used for substrate transfer, then the footprint is reduced, but the conveyor can only move in one direction at a time which limits throughput

Engineering Contradiction:

Improvefootprint of transfer systemVSAvoidsubstrate throughput

Core Design Contradiction:

Area of stationary objectVSProductivity

Solution Approach 1:

The transfer system is divided into multiple independent linear conveyors that can operate simultaneously. Each conveyor maintains a compact footprint while the parallel arrangement enables multiple substrates to be transferred at the same time, resolving the contradiction between small footprint and high throughput.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Multiple conveyors operate continuously and concurrently to transfer substrates, eliminating the idle time that occurs when a single conveyor must reverse direction. This continuous parallel operation maximizes throughput while maintaining a compact footprint.

Inventive Principle:

Principle #20Continuity of useful action

3Productivity

If conventional robots or conveyors are used for substrate transfer, then substrates can be moved between chambers, but particles are generated and regular maintenance is required

Engineering Contradiction:

Improvesubstrate transfer capabilityVSAvoidparticle generation

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

The linear conveyors are designed as simple, robust mechanisms with fewer moving parts compared to conventional rotating robots. This simplified design reduces particle generation and lowers maintenance requirements, making the conveyors more reliable for continuous substrate transfer.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

4Ease of operation

If conventional robots rotate and extend into process chambers for substrate transfer, then substrates can be moved between chambers, but the robot arm interferes with the walls of the central region chamber

Engineering Contradiction:

Improvesubstrate transfer operationVSAvoidspace required in central chamber

Core Design Contradiction:

Ease of operationVSArea of stationary object

Solution Approach 1:

Instead of having a central robot extend outward into process chambers, the system inverts the approach by using linear conveyors that move substrates along a linear path between chambers. This inversion eliminates the need for the transfer mechanism to extend into chamber spaces, avoiding wall interference and reducing central region requirements.

Inventive Principle:

Principle #13The other way round (Inversion)

Data Source

PatentUS10518418B2Wafer swapper

Publication Date: 2019.12.31 APPLIED MATERIALS INC

AI summary

The present disclosure generally relates to semiconductor process equipment used to transfer semiconductor substrates between process chambers. More specifically, embodiments described herein are related to systems and methods used to transfer, or swap, semiconductor substrates between process chambers using a transport device that employs at least two blades for the concurrent transfer of substrates between processing chambers.